A CMOS-MEMS Thermopile With Low Thermal Conductance and a Near-Perfect Emissivity in the 8–14-$\mu\hbox{m}$ Wavelength Range

Chen, Chung-Nan; Huang, Wen-Chie

doi:10.1109/led.2010.2086429

Cited by 29 publications

(5 citation statements)

References 12 publications

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“…This thermopile sensor is illustrated in the microphotograph of Figure 11. Another way to improve the thermopile performance is increasing its absorptivity: this has been achieved by adopting thin dielectric films with good absorption properties or by coating nanomaterials (e.g., porus black materials, metamaterials [57,58]) on the IR absorber surface. The first solution achieves limited absorptivity values (∼0.7 in the 9-14 µm range), while the second suffers from process incompatibility, high cost and high thermal conductivity of metal black materials [59].…”

Section: Pyrometersmentioning

confidence: 99%

Thermal Sensors for Contactless Temperature Measurements, Occupancy Detection, and Automatic Operation of Appliances during the COVID-19 Pandemic: A Review

2021

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The worldwide spread of COVID-19 has forced us to adapt to a new way of life made of social distancing, avoidance of physical contact and temperature checks before entering public places, in order to successfully limit the virus circulation. The role of technology has been fundamental in order to support the required changes to our lives: thermal sensors, in particular, are especially suited to address the needs arisen during the pandemic. They are, in fact, very versatile devices which allow performing contactless human body temperature measurements, presence detection and people counting, and automation of appliances and systems, thus avoiding the need to touch them. This paper reviews the theory behind thermal detectors, considering the different types of sensors proposed during the last ten years, while focusing on their possible employment for COVID-19 related applications.

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Section: Pyrometersmentioning

confidence: 99%

Thermal Sensors for Contactless Temperature Measurements, Occupancy Detection, and Automatic Operation of Appliances during the COVID-19 Pandemic: A Review

2021

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“…η S and η D are the target's and detector's IR absorber emissivities respectively. Due to the direct proportionality that is shown, research efforts were focused on enhancing the emissivity of the used infrared absorbers by using thin metal films [21], quarter wavelength absorbers [22], or gold-black coatings [23]. The IR absorption results in a heating of the structure, as seen in Figure 1b, with a resulting temperature difference that is directly related to the detector's thermal resistance R thermal such that:…”

Section: Working Principlementioning

confidence: 99%

Dual-Level Capacitive Micromachined Uncooled Thermal Detector

Tawfik

Allidina²,

Nabki

et al. 2019

Sensors

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This paper presents a novel dual-level capacitive microcantilever-based thermal detector that is implemented in the commercial surface micromachined PolyMUMPs technology. The proposed design is implemented side-by-side with four different single-level designs to enable a design-to-design performance comparison. The dual-level design exhibits a rate of capacitance change per degree Celsius that is over three times higher than that of the single-level designs and has a base capacitance that is more than twice as large. These improvements are achieved because the dual-level architecture allows a 100% electrode-to-detector area, while single-level designs are shown to suffer from an inherent trade-off between sensitivity and base capacitance. In single-level designs, either the number of the bimorph beams or the capacitance electrode can be increased for a given sensor area. The former is needed for a longer effective length of the bimorph for higher thermomechanical sensitivity (i.e., larger tilting angels per degree Celsius), while the latter is desired to relax the read-out integrated-circuits requirements. This thermomechanical response-to-initial capacitance trade-off is mitigated by the dual-level design, which dedicates one structural layer to serve as the upper electrode of the detector, while the other layer contains as many bimorph beams as desired, independently of the former’s area.

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“…Our research suggests that it will be more practical in thermal IR sensor applications and compatible with standard CMOS processes and more simplified signal processing. Due to the maturity of the processes and being compatible with standard CMOS technology, we devoted the promotion of IR elements to using CMOS-MEMS techniques which have proven particularly effective in the development of system on a chip (SOC) technology [ 32 , 33 , 34 ]. In summary, we give a new approach to improve the sensitivity of a CMOS-MEMS IR sensor with drop-coated rGO to achieve high thermal radiation absorption.…”

Section: Introductionmentioning

confidence: 99%

Research on a CMOS-MEMS Infrared Sensor with Reduced Graphene Oxide

Chen

2020

Sensors

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In this research, a new application of reduced graphene oxide (rGO) for a complementary metal-oxide-semiconductor (CMOS)-MEMS infrared (IR) sensor and emitter is proposed. Thorough investigations of IR properties including absorption and emission were proceeded with careful calibration and measurement with a CMOS thermoelectric sensor. The thermocouples of the sensor consist of aluminum and n-polysilicon layers which are fabricated with the TSMC 0.35 μm CMOS process and MEMS post-process. In order to improve the adhesion of rGO, a sensing area at the center of the membrane is formed with an array of holes, which is easy for the drop-coating of rGO material upon the sensing region. To evaluate the performance of the IR sensor with rGO, different conditions of the IR thermal radiation experiments were arranged. The results show that the responsivity of our proposed CMOS-MEMS IR sensor with rGO increases by about 77% compared with the sensor without rGO. For different IR absorption incident angles, the measurement of field of view shows that the CMOS-MEMS IR sensor with rGO has a smaller view angle, which can be applied for the application of long-distance measuring. In addition, characteristics of the proposed thermopile are estimated and analyzed with comparisons to the available commercial sensors by the experiments.

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A CMOS-MEMS Thermopile With Low Thermal Conductance and a Near-Perfect Emissivity in the 8–14-$\mu\hbox{m}$ Wavelength Range

Cited by 29 publications

References 12 publications

Thermal Sensors for Contactless Temperature Measurements, Occupancy Detection, and Automatic Operation of Appliances during the COVID-19 Pandemic: A Review

Thermal Sensors for Contactless Temperature Measurements, Occupancy Detection, and Automatic Operation of Appliances during the COVID-19 Pandemic: A Review

Dual-Level Capacitive Micromachined Uncooled Thermal Detector

Research on a CMOS-MEMS Infrared Sensor with Reduced Graphene Oxide

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