A coarse to fine calibration method for the q-X-Z type wafer pre-alignment device
Huikai Wu,
Yijun Zhou,
Chen Luo
et al.
Abstract:The wafer pre-alignment device is a crucial component of the equipment front-end modules (EFEM) in the integrated circuit (IC) manufacturing industry. It corrects the wafer position and orientation errors before the wafer is transferred to the subsequent fine alignment wafer stage. To solve the calibration problem of a q-X-Z type wafer pre-alignment device, the study establishes its kinematic model and constructs the relationship between each axis and a laser sensor. Compared to the conventional method of dire… Show more
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