A coaxial 0.5-18 GHz near electric field measurement system for planar microwave circuits using integrated probes

Abstract

&--Thi s paper reports on the basic theory of operation and experimental results obtained from an electric field imaging wave circuits that employs the method with rnonolithically integrated probes. capable of mapping the normal and eld intensities and electrical phase delays icrowave circuits in the frequency range of spatial electric field resolution of better than probes incorporating silicon Schottky diodes integrated with electrically small dipole and monopole antenna scatterers on a 40-pm-thick high-resistivity silicon substrate are used. Electric field intensity and electrical phase delay images tenna at 12-85 GNz. The results demonstrate

High-frequency near-field microscopy

“…Originally invented in 1955 by several groups 196 -198 to measure the electric near fields around horn antennas, it was recently expanded and theoretically treated by Bokhari et al 199 to map tangential near fields over microstrip antennas at about 1.5 GHz. Budka et al [200][201][202][203] have applied this concept to map the electric near fields of active microwave monolithic integrated circuits ͑MMICs͒. In this technique, a miniature monopole or dipole, switched by the slowly modulated bias of a diode mounted between the dipole arms, is used to periodically and locally scatter the microwave signal on a device under test ͑DUT͒.…”

“…To circumvent this problem, Budka, Waclawik, and Rebeiz 202 have proposed a transmission setup that measures the scattered signal from the output port of the device, useful for nonreciprocal DUTs, and a calibration technique has been proposed to de-embed the nonreciprocal element. 201 Another type of calibration was developed to relate amplitudes of dipole and monopole probes to create a complete vectorial electric field map. 201 The resolution of this technique is limited by the size of the monopole or dipole and the distance from the sample.…”

“…201 Another type of calibration was developed to relate amplitudes of dipole and monopole probes to create a complete vectorial electric field map. 201 The resolution of this technique is limited by the size of the monopole or dipole and the distance from the sample. Budka and co-workers report using 100 m sized probes, scanned less than 100 m above the circuit without distance feedback, resulting in a resolution of about 100 m over a range of 0.5-18 GHz.…”

“…199 Budka et al have used modulated scattering to map electric fields above coupled line bandpass filters, 200 a distributed amplifier 202 and a microstrip directional coupler. 201 For ultrafast sampling of pulses on waveguides, pump and probe experiments have been applied and mapped the spatio-temporal evolution of points, 229 lines 233 or areas 231 ͑Fig. 25͒.…”

Electric field sensing and imaging by noninvasive parallel-plate sensor

“…Besides electroscopes [1] and their posterity, conventional techniques to sense electric field are categorized into four groups: field meters [2,3], antennas [4], electrical probes [5], and electrooptic (EO) approaches [6,7,8,9,10]. The first and second are well-established but cumbersome, where impeded are the abovementioned simplicity, agility, and availability.…”