A combinatorial comparison of DC and high power impulse magnetron sputtered Cr2AlC

Field, Matthew R.; Carlsson, Patrick; Eklund, Per; Partridge, J. G.; McCulloch, D. G.; McKenzie, David R.; Bilek, M.M.M.

doi:10.1016/j.surfcoat.2014.09.052

Cited by 15 publications

(7 citation statements)

References 37 publications

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“…The Cr 2 AlC (103) peak is stronger for 120 V, which can be related to larger grains, higher crystallinity, or more MAX phase. This is in good correlation with the results of Field et al [ 27 ], who showed for DCMS and HiPIMS deposited coatings that Cr 2 AlC (103) reflection was the highest. Furthermore, the coating deposited at 120 V displays the presence of Cr 7 C 3 , AlCr 2 , and Cr 23 C 6 peaks.…”

Section: Resultssupporting

confidence: 92%

“…Cr 2 AlC has been produced using magnetron sputtering, either by sputtering from elemental targets [ 26 ] or compound targets [ 23 ]. Field et al [ 27 ] deposited Cr 2 AlC coatings using direct current magnetron sputtering (DCMS) and high power impulse magnetron sputtering (HiPIMS).…”

Section: Introductionmentioning

confidence: 99%

“…However, despite many studies on magnetron sputtered Cr 2 AlC films [ 13 , 17 , 23 , 24 , 26 , 27 , 29 , 30 , 31 ], up to now the effect of bias voltage on the chemical bonding structure, surface morphology, and mechanical properties of film is still not well understood.…”

Section: Introductionmentioning

confidence: 99%

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Chemical and Morphological Characterization of Magnetron Sputtered at Different Bias Voltages Cr-Al-C Coatings

et al. 2017

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MAX phases (M = transition metal, A = A-group element, and X = C/N) are of special interest because they possess a unique combination of the advantages of both metals and ceramics. Most attention is attracted to the ternary carbide Cr2AlC because of its excellent high-temperature oxidation, as well as hot corrosion resistance. Despite lots of publications, up to now the influence of bias voltage on the chemical bonding structure, surface morphology, and mechanical properties of the film is still not well understood. In the current study, Cr-Al-C films were deposited on silicon wafers (100) and Inconel 718 super alloy by dc magnetron sputtering with different substrate bias voltages and investigated using Scanning Electron Microscopy (SEM), X-ray Photoelectron Spectroscopy (XPS), X-ray Diffraction (XRD), Atomic Force Microscopy (AFM), and nanoindentation. Transmission Electron Microscopy (TEM) was used to analyze the correlation between the growth of the films and the coating microstructure. The XPS results confirm the presence of Cr2AlC MAX phase due to a negative shift of 0.6–0.9 eV of the Al2p to pure aluminum carbide peak. The XRD results reveal the presence of Cr2AlC MAX Phase and carbide phases, as well as intermetallic AlCr2. The film thickness decreases from 8.95 to 6.98 µm with increasing bias voltage. The coatings deposited at 90 V exhibit the lowest roughness (33 nm) and granular size (76 nm) combined with the highest hardness (15.9 GPa). The ratio of Al carbide to carbide-like carbon state changes from 0.12 to 0.22 and correlates with the mechanical properties of the coatings. TEM confirms the columnar structure, with a nanocrystalline substructure, of the films.

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Section: Resultssupporting

confidence: 92%

Section: Introductionmentioning

confidence: 99%

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Chemical and Morphological Characterization of Magnetron Sputtered at Different Bias Voltages Cr-Al-C Coatings

et al. 2017

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“…Comparison of all coatings shows that preferential (103) planes grew during the deposition process instead of (110) or (100/101). A dominant (103) diffraction peak has been reported by Zamulaeva et al [45,46] for the Cr 2 AlC coatings deposited on Ti substrates, as well as by Field [47]. In contrast, Li et al [48] discussed preferential coating growth at (110) planes taking place during deposition on the M38G super alloy.…”

Section: Coating Microstructurementioning

confidence: 91%

Sputtering Power Effects on Growth and Mechanical Properties of Cr2AlC MAX Phase Coatings

Naveed

Obrosov

Żak

et al. 2016

Metals

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Abstract:Coating growth and mechanical properties of nanolamellar Cr 2 AlC coatings at various sputtering power were investigated in the present study. Cr 2 AlC coating was deposited on the IN 718 superalloy and (100) Si wafers by DC magnetron sputtering at different sputtering powers. The structure and properties were characterized using X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and nanoindentation. It was found that coatings had columnar structure with nanocrystalline substructure. Deposition rate increased with the sputtering power. XRD results showed the presence of the Cr 2 AlC MAX phase, intermetallic AlCr 2 and Cr 7 C 3 carbide phases, along with the change in preferential coating growth orientation. TEM observations confirmed the occurrence of these phases, and the SAED patterns demonstrated significant texture of the coatings. Hardness values were measured in the range between 11-14 GPa, showing a slight increase with the sputtering power.

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“…The films exhibited excellent oxidation and corrosion properties. Field et al reported the synthesis of MAX-phase Cr 2 AlC films by a combinatorial approach, especially comparing the HiPIMS and DC magnetron technique under similar conditions on the Cr target [30]. The HiPIMS coating generally exhibited lower resistivity than the conventional DC magnetron sputtering (DCMS) coating.…”

Section: Introductionmentioning

confidence: 99%

Oxidation and Corrosion Behavior of Nanolaminated MAX‐Phase Ti₂AlC Film Synthesized by High‐Power Impulse Magnetron Sputtering and Annealing

Zhang

Xia

et al. 2015

Journal of Nanomaterials

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Nanolaminated MAX-phase Ti2AlC thin films were synthesized by high-power impulse magnetron sputtering (HiPIMS) from a MAX-phase Ti2AlC target. The amorphous matrix Ti-Al-C films were deposited at room temperature, while the MAX-phase Ti2AlC films were obtained through annealing process of the as-deposited amorphous matrix films. The microstructure, oxidation resistance, and corrosion behavior of these two films were comparatively investigated. The results indicated that the MAX-phase Ti2AlC films had superior antioxidation and anticorrosion properties than the amorphous matrix Ti-Al-C films, which is attributed to the rapid formation of dense Al2O3layer on the top of MAX-phase Ti2AlC films because of the rapid diffusion of Al atoms in the typical nanolaminated structure of MAX phase.

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A combinatorial comparison of DC and high power impulse magnetron sputtered Cr2AlC

Cited by 15 publications

References 37 publications

Chemical and Morphological Characterization of Magnetron Sputtered at Different Bias Voltages Cr-Al-C Coatings

Chemical and Morphological Characterization of Magnetron Sputtered at Different Bias Voltages Cr-Al-C Coatings

Sputtering Power Effects on Growth and Mechanical Properties of Cr2AlC MAX Phase Coatings

Oxidation and Corrosion Behavior of Nanolaminated MAX‐Phase Ti₂AlC Film Synthesized by High‐Power Impulse Magnetron Sputtering and Annealing

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A combinatorial comparison of DC and high power impulse magnetron sputtered Cr2AlC

Cited by 15 publications

References 37 publications

Chemical and Morphological Characterization of Magnetron Sputtered at Different Bias Voltages Cr-Al-C Coatings

Chemical and Morphological Characterization of Magnetron Sputtered at Different Bias Voltages Cr-Al-C Coatings

Sputtering Power Effects on Growth and Mechanical Properties of Cr2AlC MAX Phase Coatings

Oxidation and Corrosion Behavior of Nanolaminated MAX‐Phase Ti2AlC Film Synthesized by High‐Power Impulse Magnetron Sputtering and Annealing

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Oxidation and Corrosion Behavior of Nanolaminated MAX‐Phase Ti₂AlC Film Synthesized by High‐Power Impulse Magnetron Sputtering and Annealing