1997
DOI: 10.1016/s0039-6028(97)00179-9
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A combined AES, resonant photoemission and EELS study of in-situ grown titanium nitride

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Cited by 23 publications
(10 citation statements)
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“…The density parameter r S = 1 .6 1 a.u . for the FEG (which corresponds to ~7 electrons per molecule) was obtained from the experimental plasmon energy of TiN 27 . On this basis, for protons, excellent agreement with DFT predictions has been found 26 .…”
Section: Resultsmentioning
confidence: 99%
“…The density parameter r S = 1 .6 1 a.u . for the FEG (which corresponds to ~7 electrons per molecule) was obtained from the experimental plasmon energy of TiN 27 . On this basis, for protons, excellent agreement with DFT predictions has been found 26 .…”
Section: Resultsmentioning
confidence: 99%
“…Although the optical properties and electronic structure of TiN and TiN x have been studied previously 10,[15][16][17][18][19][20][21][22][23][24][25] their correlation with the microstructural features and the process parameters during deposition, affecting their stoichiometry and microstructure, 12,26 -28 has not been established yet. In this work we address the optical properties of thin sputtered TiN x films in terms of their complex dielectric function ͓()ϭ 1 ϩi 2 ͔ measured by spectroscopic ellipsometry ͑SE͒.…”
Section: Introductionmentioning
confidence: 99%
“…Many techniques, such as X-ray photoelectron spectroscopy (XPS) (Prieto & Kirby, 1995), Auger electron spectroscopy (AES) (Tompkins, 1991;Kottke et al, 1991), electron energy-loss spectroscopy (EELS) (Walker et al, 1997), transmission electron microscopy (TEM) and electron dispersive spectroscopy (EDS) (Lee et al, 1999), and X-ray absorption spectroscopy (XAS) (Soriano, et al, 1993), have been used to study the thermal properties of TiN x films and to understand the failure mechanism of the TiN x barrier. In this work, we study a series of Al/TiN x /Si(100) thin films as a function of the TiN x film thickness (100Å-500Å) and of the annealing temperature (400°C -600 °C), using multi-element, multi-edge and multi-detection mode X-ray photoabsorption spectroscopy.…”
Section: Introductionmentioning
confidence: 99%