A compact and high flow-rate piezoelectric micropump with a folded vibrator

Wang, Xue Yan; Yu, Ting; Yan, Gang; Feng, Zhi Hua

doi:10.1088/0964-1726/23/11/115005

Cited by 59 publications

(36 citation statements)

References 30 publications

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“…When the pump discharges liquid, the hysteresis of opening the outlet valve reduces the amount of liquid discharged from the pump chamber, and the hysteresis of closing the inlet valve makes the liquid in the pump chamber return to the inlet pipe again. Researchers have been committed to designing valves with high-frequency response to solve this problem [ 12 , 13 , 14 , 15 , 16 ]. The existing research in this field has become mature, and the response frequency of some high-frequency valves reachs over 1 kHz.…”

Section: Introductionmentioning

confidence: 99%

A Theoretical and Experimental Study of a Piezoelectric Pump with Two Elastic Chambers

Zhao

Guo

2020

Sensors

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The paper is a continuation of our work on the dynamic load in piezoelectric pumps. In the study, the dynamic load of liquid in the pipelines was proposed as a key factor that limits the output performance of piezoelectric pumps. To decrease the dynamic load, a piezoelectric pump with two elastic chambers was proposed in our previous published work. In this paper, the performance and key parameters of the piezoelectric pump with two elastic chambers were studied through theoretical analyses and experimental tests. After establishing the mathematical model of the piezoelectric pump with two elastic chambers, the paper theoretically analyzed the performance of the pump and the effect of different structural parameters on the performance. Then prototypes with a range of structural parameters were developed and tested. As revealed from the test results, the elastic chamber effectively decreased the dynamic load of the liquid in the pipelines and the flow rate of the prototype with two elastic chambers was higher than that of the prototype with one or no elastic chamber. However, the elastic chamber did not lead to the increase in the maximum output backpressure of the prototype. Adopting an elastic diaphragm exhibiting a smaller stiffness or a larger diameter could help decrease the dynamic load of the liquid. The elastic chamber more significantly impacted the flow rate of the piezoelectric pump with long pipelines. The pump chamber height had a significant effect on the output performance of the piezoelectric pump with two elastic chambers, which is consistent with the conventional piezoelectric pump. At the height of 0.2 mm, the flow rate of the prototype with two elastic chambers was peaked at 7.7 mL/min; at the height of 0.05 mm, the output backpressure reached the highest of 28.2 kPa. The dynamic load could decrease the amplitude of the piezoelectric vibrator, whereas the prototype with two elastic chambers could effectively reduce the impact of dynamic load on the piezoelectric vibrator. The flow rate decreased almost linearly with the backpressure. Under the same backpressure, the flow rate of the prototype with two elastic chambers was higher than that of the prototype without elastic chamber, and the flow rate difference between the two prototypes gradually decreased with the backpressure.

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Section: Introductionmentioning

confidence: 99%

A Theoretical and Experimental Study of a Piezoelectric Pump with Two Elastic Chambers

Zhao

Guo

2020

Sensors

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“…Most previous publications on piezoelectric pumps are dedicated to single-chamber pumps, and remarkable progress in theoretical and experimental studies has thus been made. However, due to the relatively weak output capabilities, single-chamber piezoelectric pumps cannot meet the requirements of high pumping flow and pressure for many application fields such as electronic water cooling, piezoelectric hybrid actuator, and fuel cells (Bayomy et al, 2016; De Lima et al, 2009; Li et al, 2017; Wang et al, 2014a, 2014b). Accordingly, considerable efforts are devoted to enhance the output flow and pressure of piezoelectric pumps.…”

Section: Introductionmentioning

confidence: 99%

“…Using a hinge-lever amplification mechanism, Ham et al (2009) developed a piezoelectric pump with the maximum output flow rate and pressure of 600 mL/min and 6.8 kPa, respectively. Through a newly developed piezoelectric folded vibrator, Wang et al (2014a) presented a high-flow-rate piezoelectric pump with the maximum flow rate of 118 mL/min and the maximum backpressure of 22.5 kPa. Besides, Wang et al (2014b) developed a novel resonantly driven piezoelectric pump with the maximum flow rate of 105 mL/min and the maximum backpressure of 23 kPa at 490 Hz and 400 V by adopting two polydimethylsiloxane (PDMS) valves and compressible spaces.…”

Section: Introductionmentioning

confidence: 99%

“…Through a newly developed piezoelectric folded vibrator, Wang et al (2014a) presented a high-flow-rate piezoelectric pump with the maximum flow rate of 118 mL/min and the maximum backpressure of 22.5 kPa. Besides, Wang et al (2014b) developed a novel resonantly driven piezoelectric pump with the maximum flow rate of 105 mL/min and the maximum backpressure of 23 kPa at 490 Hz and 400 V by adopting two polydimethylsiloxane (PDMS) valves and compressible spaces. Apart from the optimization of the geometrical design, lots of researchers found that improved pumping performance could be achieved by combining several single-chamber pumps in series or in parallel.…”

Section: Introductionmentioning

confidence: 99%

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Performance evaluation and comparison of a serial–parallel hybrid multichamber piezoelectric pump

Zhang

Chen

Wang

et al. 2018

Journal of Intelligent Material Systems and Structures

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To improve the output capability of piezoelectric pumps, researchers have made an attempt to combine multiple single-chamber pumps either in series or in parallel. In this article, a serial–parallel hybrid multichamber piezoelectric pump is presented. The novel serial–parallel hybrid multichamber piezoelectric pump structure is characterized by the simultaneous occurrence of serial/parallel forms through a combination of synchronous and asynchronous modes of piezoelectric actuators. Moreover, the pump can be operated in multiple working modes to obtain the desired chamber volume and number through different serial–parallel configurations. The performance characteristics of the pump with various serial–parallel hybrid combinations were experimentally investigated and evaluated using a quintuple-chamber pump at 90 V with a frequency range of 60–400 Hz. Experimental results showed that the characteristics in terms of flow rate and backpressure changed significantly with different serial–parallel modes. Nevertheless, the backpressure presented very similar characteristics for the serial–parallel hybrid multichamber piezoelectric pump with the same number of in-phase parallel actuators. Meanwhile, the frequency-dependent flow rate characteristics were approximately similar for those pumps with symmetric serial–parallel combinations. It was found that the flow rate and backpressure mainly depended on the actuation frequency and serial–parallel modes, respectively. Compared with the quintuple-chamber pump with full out-of-phase actuators, the maximum powers of the serial–parallel hybrid multichamber piezoelectric pump with two, three, four, and five in-phase actuators were decreased by 21.1%, 51.4%, 77.7%, and 94.4%, respectively.

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“…For the precise conveying of fuel cells, in 2014, the University of Science and Technology of China presented a resonant piezoelectric diaphragm pump, which has compressible spaces at the inlet and outlet of the pump chamber [10,11]. The external dimensions of the pump are 100 mm × 20 mm × 15 mm.…”

Section: Introductionmentioning

confidence: 99%

A Resonant Piezoelectric Diaphragm Pump Transferring Gas with Compact Structure

et al. 2016

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In order to improve the output capacity of a piezoelectric pump when transferring gas, this paper presents a compact resonant piezoelectric diaphragm pump (hereinafter referred to as the piezoelectric diaphragm pump), which is driven by a rectangular piezoelectric vibrator. The compact structure can effectively release the vibrating constraints of the vibrator, and enlarge its center output displacement, so as to increase the volume change rate of the pump chamber. Based on the structure and the working principle of this piezoelectric diaphragm pump, a dynamic model for the diaphragm system is established in this paper, and an analysis on factors affecting the resonant frequency of the system is then conducted. We tested on the prototype under the driving voltage of 260 Vpp. The results show that the diaphragm system reaches resonance under the driving frequency of 265 Hz, which is very close to the fundamental frequency of check valve. Compared with the rectangular piezoelectric vibrator’s amplitude, the diaphragm’s amplitude is double amplified. At this time, the piezoelectric diaphragm pump achieves the maximum gas flow rate as 186.8 mL/min and the maximum output pressure as 56.7 kPa.

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A compact and high flow-rate piezoelectric micropump with a folded vibrator

Cited by 59 publications

References 30 publications

A Theoretical and Experimental Study of a Piezoelectric Pump with Two Elastic Chambers

A Theoretical and Experimental Study of a Piezoelectric Pump with Two Elastic Chambers

Performance evaluation and comparison of a serial–parallel hybrid multichamber piezoelectric pump

A Resonant Piezoelectric Diaphragm Pump Transferring Gas with Compact Structure

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