A Compact Fiber Optic Fabry–Perot Sensor for Simultaneous Measurement of Acoustic and Temperature

Liu, Xiaoying; Liu, Tiegen; Wang, Shuang; Liu, Kun; Xue, Lei; Wang, Xue; Ma, Zhe; Zhang, Yongning

doi:10.1109/jphot.2019.2948045

Cited by 17 publications

(3 citation statements)

References 27 publications

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“…(B) Test results of acoustic pressure measurement after temperature compensation at different temperatures of 12°C, 47°C, and 75°C. (C) ~ (E) A compact fiber optic F‐P sensor with silicon‐glass‐silicon sandwich structure 86 . (C) Schematic diagram of the sensor.…”

Section: Multi‐parameter Measurementmentioning

confidence: 99%

“…This type of detection scheme is actually a combination of two independent detection systems. As shown in Figure 6(C)~(E), Liu et al 86 proposed a compact optical fiber F‐P sensor for simultaneous acoustic and temperature measurement. The sensor consists of a silicon‐glass‐silicon sandwich structure bonded through anodic bonding.…”

Section: Multi‐parameter Measurementmentioning

confidence: 99%

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Fast interrogation of dynamic low‐finesse Fabry‐Perot interferometers: A review

Liu

Peng

2021

Micro & Optical Tech Letters

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Low‐finesse fiber‐optic Fabry–Perot (F‐P) interferometric sensor has the advantages of high sensitivity, anti‐electromagnetic interference, and compact size, and is one of the most widely used optical fiber sensors. With the development of sensor design and demodulation algorithms, F‐P sensing technique plays an increasingly important role in high‐speed dynamic measurement, such as dynamic temperature or pressure, acoustic vibration, dynamic displacement, and distance. Signal demodulation methods largely determine the performance of the entire sensing system. Compared with quasi‐static measurement, high‐precision measurement of dynamic F‐P cavity is more challenging. The advancement of fast tunable laser technology in telecommunication field provides novel perspectives for demodulation methods and dynamic applications based on F‐P sensors. This article reviews the latest developments in fast interrogation techniques for dynamic low‐finesse F‐P sensors, including intensity demodulation, quadrature phase demodulation and absolute cavity length demodulation. In addition, array multiplexing and multi‐parameter measurement techniques are also involved.

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Section: Multi‐parameter Measurementmentioning

confidence: 99%

Section: Multi‐parameter Measurementmentioning

confidence: 99%

Fast interrogation of dynamic low‐finesse Fabry‐Perot interferometers: A review

Liu

Peng

2021

Micro & Optical Tech Letters

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“…At the same time, the temperature tolerance of the sensor is also verified, and the operating temperature can be as high as 800 °C. However, most of the current research studies only focus on the high-temperature tolerance of FOASs [27,28] because the mechanical characteristics of the acoustic sensitive membrane can affect the accuracy of the sensor in the vibration environment.…”

Section: Introductionmentioning

confidence: 99%

The manufacture and reliability analysis of the all-rigid Fabry–Perot resonator for fiber-optic acoustic sensors

et al. 2023

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By the continuous development of aerospace, petroleum exploration, and other industrial fields, the fiber-optic acoustic sensor (FOAS) with high reliability is a desideration sensor, which can be used for noise monitoring in the extremely harsh environment. The FOAS based on the all-rigid Fabry–Perot resonator (FPR) relies on the new acoustic sensitive principle, where the change in the air refractive index is induced by sound waves and gets rid of the distortion caused by the mechanical characteristics of the acoustic sensor based on the movable parts. So, the FPR-based FOAS is very suitable for acoustic sensing in the harsh environment. In this paper, the reliability of this kind of FOASs is simulated and analyzed. The modal and anti-vibration simulation results of FPR with different sizes show that the FPR has a high natural frequency, and the external vibration environment does not affect the acoustic sensitivity of the FPR. The micro and small-batch all-rigid FPR can be manufactured by the optical contact. Moreover, the FPR can withstand the high temperature of 500°C that is verified by rapid heat treatment equipment. In order to improve the reliability of the FOAS, the metal packing shell is designed and fabricated. Moreover, the vibration and high-temperature tests of the packaged sensor are carried out. The two groups of tests show that the sensor can work normally under 10 g of acceleration vibration and 200°C high temperature, respectively. Therefore, the FOAS based on the FPR has high reliability and is very suitable for noise monitoring in the extreme harsh environment of various industrial fields. Furthermore, the research results of this paper will enhance the competitiveness and influence of the commercialized FOAS.

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Fringe double for self-mixing interference based on the narrow transmission spectrum mapping

Chen

Wang

Xia

et al. 2020

Review of Scientific Instruments

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In this work, a novel fringe double scheme with a Fabry–Pérot (F–P) cavity is proposed for self-mixing interferometry based on the narrow transmission spectrum mapping. While the laser beam with self-mixing interference (SMI) propagates through the F–P cavity with the narrow transmission spectrum, the SMI fringe doubles as the optical frequency modulation caused by SMI sweeps the peak of the transmission spectrum of the F–P cavity completely. The doubled SMI signal is very suitable for displacement reconstruction with fringe counting and velocity monitoring with joint time-frequency analysis, since it inherits the merits of the transmission spectrum of the F–P cavity (sharp, neat, and stable). This method has the potential to simplify signal processing and improve the resolution of SMI measurement systems.

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A Compact Fiber Optic Fabry–Perot Sensor for Simultaneous Measurement of Acoustic and Temperature

Cited by 17 publications

References 27 publications

Fast interrogation of dynamic low‐finesse Fabry‐Perot interferometers: A review

Fast interrogation of dynamic low‐finesse Fabry‐Perot interferometers: A review

The manufacture and reliability analysis of the all-rigid Fabry–Perot resonator for fiber-optic acoustic sensors

Fringe double for self-mixing interference based on the narrow transmission spectrum mapping

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