A compact SR beamline for fabrication of high aspect ratio MEMS microparts

Saito, Susumu; Zhang, Y.; Ueno, Hiroshi; Hosaka, Makoto; Fujimoto, Tomomi; Maeda, Ryutaro; Tanaka, Takahiro

doi:10.1109/mhs.1996.563405

Cited by 17 publications

(7 citation statements)

References 5 publications

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“…In our experiments, deep X-ray lithography is carried out using the beamline for the LIGA process of the synchrotron radiation (SR) light source, "AURORA", at Ritsumeikan University [8]. The beamline, which is com-…”

Section: Designmentioning

confidence: 99%

A Study on the Sub-Micron LIGA Process

Ueno

Saito

2001

IEEJ Trans. SM

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Section: Designmentioning

confidence: 99%

A Study on the Sub-Micron LIGA Process

Ueno

Saito

2001

IEEJ Trans. SM

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“…To manufacture high aspect ratio MEMS with high performance [5,6], we wanted to achieve the maximum lithography depth.…”

Section: Contrastmentioning

confidence: 99%

“…Pmin and PTh were obtained by the following proce dure, appropriate for the wavelength range for Xray lithography in the LIGA process using AURORA, which is mainly less than 7.3 A [5]. The beam spectrum of AURORA is converted into the exposure energy spectrum per unit time E_?…”

Section: Contrastmentioning

confidence: 99%

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X-ray Mask with SiC Membrane for LIGA Process

et al. 1999

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“…3 shows 50 mm-high microgears obtained using a tungsten absorber with a silicon nitride membrane. Details are given by Sugiyama et al (1996). Photoelectron spectroscopy provides information on the electronic structure of materials and is indispensable in the development of semiconductor technology.…”

Section: Figurementioning

confidence: 99%

Compact Superconducting Ring at Ritsumeikan University

Iwasaki

Nakayama

Ozutsumi

et al. 1998

J Synchrotron Radiat

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A compact superconducting storage ring (0.575 GeV and 300 mA) with a racetrack microtron injection system was installed at Ritsumeikan University and has been operated successfully since April 1996. As the radius of the circular electron orbit is small (0.5 m), it is possible to use a radiation beam of relatively high photon¯ux at a short distance from the source point. Beamlines have been constructed including those for XAFS, soft X-ray spectroscopy, VUV spectroscopy,¯uorescent X-ray analysis, soft X-ray microscopy, X-ray diffraction/scattering and photoelectron spectroscopy; the photoelectron spectrometer is combined with an ion-beam-scattering spectrometer to obtain information both on the electronic states and on the atomic arrangements of a solid surface. In addition there are two beamlines, one for LIGA exposure and the other for synchrotron radiation ablation, which are devoted to producing new devices and materials. The synchrotron radiation facility is open not only to users in the University but also to researchers in industry, governmental institutions and other universities.

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A compact SR beamline for fabrication of high aspect ratio MEMS microparts

Cited by 17 publications

References 5 publications

A Study on the Sub-Micron LIGA Process

A Study on the Sub-Micron LIGA Process

X-ray Mask with SiC Membrane for LIGA Process

Compact Superconducting Ring at Ritsumeikan University

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