A Comparative Analysis of Run-to-Run Control Algorithms in the Semiconductor Manufacturing Industry

Ning, Z.; Moyne, James; Smith, T.; Boning, Duane S.; Yeh, Jinn-Yi; Hurwitz, Arnon M.

doi:10.1201/9781420040661.ch6

Cited by 8 publications

(16 citation statements)

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“…The underlying process model is obtained from a chemical mechanical planarization (CMP) process (Ning, 1996), where the units are dropped for simplicity: −1382:60 + [50:18; −6:65; 163:4; 8:45]…”

Section: Comparison Of the Dhobe-mr And Dhobe-sv Controllers With Thementioning

confidence: 99%

“…This need has originated a collection of techniques called RtR control (Baras & Patel, 1996;Sachs, Hu, & Ingolfsson, 1995;Boning, Moyne, & Smith, 1995;Castillo & Yeh, 1998;Hankinson, Vincent, Irani, & Khargonekar, 1997;Ingolfsson & Sachs, 1993;Ning, 1996;Deng, 1999). RtR control is a form of discrete-time process control in which the product recipe with respect to a particular equipment process is modiÿed ex situ, i.e.…”

Section: Introductionmentioning

confidence: 99%

“…The LSE method. Typical examples are the optimizing adaptive quality controller (OAQC) (Castillo & Yeh,1 There are also some other RtR control methods such as the probabilistic approach (Hamby, Kabamba, & Khargonekar, 1998) and the machine learning approach Ning, 1996. They are not so e ective and will not be introduced in this paper.…”

Section: Introductionmentioning

confidence: 99%

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Run-to-run control methods based on the DHOBE algorithm

Zhang¹,

Deng²,

Baras³

2003

Automatica

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Since process models are typically not known exactly in real problems, it is important to estimate the process parameters before one applies the optimal control to a process. In this paper, the Dasgupta-Huang optimal bounding ellipsoid (DHOBE) algorithm is employed to estimate process parameters in semiconductor process run-to-run (RtR) control. At each iteration, the DHOBE algorithm returns an outer bounding ellipsoid of the likely process parameter set. If the vector center of the ellipsoid is taken as the estimate of the process parameter vector, then a model-reference controller results; if the vector within the ellipsoid that produces the worst expected cost is taken as the process parameter estimate, then a worst-case controller results. These two methods are compared with other RtR control schemes: the exponentially weighted moving average (EWMA) method and the optimizing adaptive quality controller (OAQC). Simulation results show that the performance of the model-reference RtR controller based on the DHOBE algorithm is comparable to or better than that of the other two RtR controllers in some speciÿc examples of semiconductor processes. ?

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Section: Comparison Of the Dhobe-mr And Dhobe-sv Controllers With Thementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Run-to-run control methods based on the DHOBE algorithm

Zhang¹,

Deng²,

Baras³

2003

Automatica

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“…For more details about the OAQC, we recommend readers to [4]. Simulations in [13] showed that the OAQC had better performance than the EWMA controller did in controlling a nonlinear process. The Kalman filter based approach uses a linear model to describe a process.…”

Section: Classification Of Rtr Control Methodsmentioning

confidence: 99%

“…Run-to-Run (RtR) control plays an important role in semiconductor manufacturing processes [1]- [5], [9]- [11], [13]- [18]. A RtR controller is a model-based process control system that combines the advantage of both the statistical process control and the feedback control.…”

Section: Introductionmentioning

confidence: 99%

Performance evaluation of run-to-run control methods in semiconductor processes

Zhang

Deng

Baras

Proceedings of 2003 IEEE Conference on Control Applications, 2003. CCA 2003.

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Run-to-Run (RtR) control plays an important role in semiconductor manufacturing processes. In this paper, RtR control methods are classified and evaluated. The set-valued RtR controllers with ellipsoid approximation are compared with two typical RtR controllers: the Exponentially Weighted Moving Average (EWMA) controller and the Optimizing Adaptive Quality Controller (OAQC) by simulations according to the following criteria: A good RtR controller should be able to compensate for various disturbances, such as small drifts, step disturbances and model errors; moreover, it should be able to deal with bounds, cost requirement and multiple targets that are often encountered in semiconductor processes. Based on our simulation results, suggestions on selection of a proper RtR controller for a semiconductor process are given as conclusions. *

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State Estimation for Integrated Moving Average Processes in High-Mix Semiconductor Manufacturing

Wang

Edgar

2013

Ind. Eng. Chem. Res.

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High-mix manufacturing in the semiconductor industry has driven the development of several nonthreaded state estimation methods. These methods share information among different manufacturing contexts and avoid data segregation that threaded methods require. However, existing nonthreaded methods consider either white noise disturbance or integrated white noise disturbance. In this work, we derive the state-space representation of the nonthreaded state estimation problem. The derivation considers an integrated moving average (IMA) disturbance, which is more realistic than white noise or integrated white noise disturbance for most semiconductor processes. In addition, the derivation considers the fact that if a context item is not involved in a process run, then its state does not change. Finally, we propose an improved nonthreaded state estimation method based on the Kalman filter. Simulations examples are given to demonstrate the performance of the proposed method, which is also compared with the existing Kalman filter approach, which considers integrated white noise only. A practical modification of the improved Kalman filter is also proposed to significantly simplify the implementation while providing comparable state estimation performance.

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A Comparative Analysis of Run-to-Run Control Algorithms in the Semiconductor Manufacturing Industry

Cited by 8 publications

References 0 publications

Run-to-run control methods based on the DHOBE algorithm

Run-to-run control methods based on the DHOBE algorithm

Performance evaluation of run-to-run control methods in semiconductor processes

State Estimation for Integrated Moving Average Processes in High-Mix Semiconductor Manufacturing

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