2019
DOI: 10.1049/mnl.2018.5390
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A comparative investigation of low work‐function metal implantation in the oxide region for improving electrostatic characteristics of charge plasma TFET

Abstract: Abruptness at tunnelling junction is a vital issue with doped tunnel field-effect transistor (TFET) to achieve improved electrostatic characteristics. This task is more problematic for charge plasma TFET (CP-TFET) because of large tunnelling barrier at the channel/source interface. In this regard, an effective approach has already been employed through implantation of a horizontal metallic splint (HMS) inside the dielectric region near channel/source joint for improved electrical behaviour of CP-TFET. However,… Show more

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Cited by 12 publications
(6 citation statements)
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“…RDF was found to cause a significant variance in the threshold voltage (V T ) and SS between devices [37,38]. Thus, to address this issue, dopingless TFETs (DL-TFETs) are rapidly becoming reliable candidates based on the charge plasma concept necessary for the formation of source and drain regions [39][40][41][42][43][44]. To date, charge plasma-based DL-TFETs have played a crucial role in solving the RDF issue frequently occurring in sub-5 nm technology nodes.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…RDF was found to cause a significant variance in the threshold voltage (V T ) and SS between devices [37,38]. Thus, to address this issue, dopingless TFETs (DL-TFETs) are rapidly becoming reliable candidates based on the charge plasma concept necessary for the formation of source and drain regions [39][40][41][42][43][44]. To date, charge plasma-based DL-TFETs have played a crucial role in solving the RDF issue frequently occurring in sub-5 nm technology nodes.…”
Section: Introductionmentioning
confidence: 99%
“…Thus, numerous studies have been dedicated to solving the aforementioned issues in DL-TFET devices. One example is the insertion of a metal splint between the gate electrode and source or drain electrode to enhance the oncurrent [44]. The other is bandgap engineering by controlling the material or thickness of the body [45].…”
Section: Introductionmentioning
confidence: 99%
“…Although the new structures can solve the problem to a certain extent, the device performance still has room for improvement. The size scale application of TFETs is limited by the lower on-current, larger miller capacitance, and the heavily doped steep junctions [17,18]. Therefore, it is necessary to further study the new structure and technology of TFET.…”
Section: Introductionmentioning
confidence: 99%
“…As a whole, TFETs reported in recent years adopt abrupt junction at tunneling interface, which leads to a complex fabrication processes and a high thermal budget. In addition, a heavily doped concentration in the channel and active region are also challenging during the fabrication process and it is easy to be influenced by random dopant fluctuations (RDFs) [17][18][19][20][21].…”
Section: Introductionmentioning
confidence: 99%