The interactions between a solid and a liquid at their interface often produces exotic effects that could be used in energy-related applications. To this end, the understanding of which properties controls the zeta potentials at the interface promises to advance the application of these effects. In this study, we fabricated fluorocarbon films by plasma-enhanced chemical vapor deposition to investigate the interaction of the film with aqueous solution. We found that the properties of the films can be controlled by the deposition pressure and the zeta potential correlates with the bonding states within the films. The control of the interfacial potential between the solid material and the aqueous solution can be a factor for maximizing energy output and optimizing device design.