A Comparative Study on the Photocatalytic and Gas Sensing Properties of Pure and N‐doped TiO<sub>2</sub> thin Films

Delan, Annekatrin; Karuppasamy, A.; Schultheiss, E

doi:10.1002/ppap.200931805

Cited by 8 publications

(2 citation statements)

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“…A gas sensor area of about 3.5 mm 2 on the silicon wafer was heated using a small platinum heater. The measurement setup is described in detail elsewhere [14]. Sensitivity to ethanol was determined in a computer controlled measurement setup described in [15].…”

Section: Methodsmentioning

confidence: 99%

Metal-oxide-based nanocomposites comprising advanced gas sensing properties

Пономарева

Мошников

Glöß

et al. 2012

J. Phys.: Conf. Ser.

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Abstract. Using the sol-gel technique, nanocomposite SiO 2 -SnO 2 thin films comprising a designed hierarchical pore structure were prepared on cost-efficient oxidized silicon substrates. These films exhibit advanced gas sensing properties both for reducing gases and oxygen due to an efficient analyte transport by mesoporores. IntroductionGas sensitivity of metal oxide gas sensors increases rapidly when the dimensions of oxide sensing materials become comparable or smaller than the typical thickness of the electron depletion layer [1]. Therefore, nanosized materials exhibit outstanding properties in sensor application, particularly low operation temperature and high sensitivity, attributed to their large surface area to volume ratio.Hierarchical structures are higher dimensional structures composed of many, lower dimensional building blocks. Because they are generally larger than the individual nanostructures, their van der Waals attraction is relatively weak. On the other hand, hierarchical microstructures provide an effective gas diffusion path via well aligned mesoporous structures without sacrificing a high surface area [2]. Consequently, they exhibit high gas sensitivity and fast gas response. Hierarchical nanostructures for gas sensors were prepared by vapour phase growth, hydrothermal or hydrothermal/solvothermal reactions [2], by electrospinning and subsequent oxygen plasma etching [3], by ultrasonic spray pyrolysis [4], by flame-spray-pyrolysis [5,6], and by pulsed laser deposition techniques [7]. Well defined hierarchical pore structures were prepared by sol-gel method in alkoxyderived silica systems [8] as well as in aluminium salt solutions [9] utilizing a phase separation mechanism as a pore forming principle. Recently, one of our laboratories has applied this approach for the fabrication of SnO 2 -SiO 2 composites comprising hierarchical macro-, meso-and micropores (according to IUPAC notation [10]). This minimises the build up of thermal stresses during sensor fabrication and, therefore, improves adhesion. Moreover, our technology is based on inexpensive precursors such as SnCl 2 and tetraethylorthosilicate (TOES). In the first case, advantages compared to alkoxides are besides the precursor costs a reduced sensitivity of the precursor to heat, moisture and light, and an improved time stability of the sol against the increase in viscosity. On the other hand, the presence of Cl -increases the gelling time. In this work, we investigate gas sensing properties of sol-gel deposited nanocrystalline SnO 2 -SiO 2 composites in relation to their microstructure and demonstrate gas sensitivities at the state-of-art level.

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Section: Methodsmentioning

confidence: 99%

Metal-oxide-based nanocomposites comprising advanced gas sensing properties

Пономарева

Мошников

Glöß

et al. 2012

J. Phys.: Conf. Ser.

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“…TiO 2 thin films are widely used in optical coatings, dye sensitized solar cells, gas sensors, and so on [1,2]. The effect of doping titanium dioxide with small amounts of nitrogen is now correlated in relation with photo-catalytic activity enhancement under UV and visible light illumination [3,4] and gas sensing properties [5].…”

Section: Introductionmentioning

confidence: 99%

Characterization of Rutile N-Doped TiO<sub>2</sub> Films Prepared by RF Magnetron Sputtering

Dobromir

Manole

Rebegea

et al. 2013

KEM

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Rutile N-doped TiO2thin films were grown by RF magnetron sputtering on amorphous and crystalline substrates at room temperature. The surface elemental analysis, investigated by X-ray photoelectron spectroscopy indicated that the nitrogen content of the films could be adjusted up to values as high as 4.1 at.%. As demonstrated by the X-ray diffraction data, the as-deposited films (100 200 nm thick) showed no detectable crystalline structure, while after successive annealing in air for one hour at 400°C, 500°C and 600°C, the (110) rutile peaks occurred gradually as dominant features. The rutile phase in the films was confirmed by the band gap values of the deposited materials, which stabilized at 3.1 eV, for the thin films having 200 nm thicknesses.

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The photocatalytic properties of Ti–Mo oxides prepared by a simple sol–gel route

Gutbrod

Zollfrank

2013

J Sol-Gel Sci Technol

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A Comparative Study on the Photocatalytic and Gas Sensing Properties of Pure and N‐doped TiO₂ thin Films

Cited by 8 publications

References 5 publications

Metal-oxide-based nanocomposites comprising advanced gas sensing properties

Metal-oxide-based nanocomposites comprising advanced gas sensing properties

Characterization of Rutile N-Doped TiO<sub>2</sub> Films Prepared by RF Magnetron Sputtering

The photocatalytic properties of Ti–Mo oxides prepared by a simple sol–gel route

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A Comparative Study on the Photocatalytic and Gas Sensing Properties of Pure and N‐doped TiO2 thin Films

Cited by 8 publications

References 5 publications

Metal-oxide-based nanocomposites comprising advanced gas sensing properties

Metal-oxide-based nanocomposites comprising advanced gas sensing properties

Characterization of Rutile N-Doped TiO<sub>2</sub> Films Prepared by RF Magnetron Sputtering

The photocatalytic properties of Ti–Mo oxides prepared by a simple sol–gel route

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A Comparative Study on the Photocatalytic and Gas Sensing Properties of Pure and N‐doped TiO₂ thin Films