A comparative study on Ti1−xAlxN coatings reactively sputtered from compound and from mosaic targets

Influence of the Thickness of Multilayer Composite Nano-Structured Coating Ti–TiN–(Ti,Al,Si)N on the Tool Life of Metal-Cutting Tools and the Nature of Wear

“…Coatings with three-layer architecture proved in [18][19][20] were deposited, and the Hume-Rothery rules [39] were followed to select the proportion of elements in the coating composition. Considering the results of the earlier studies [40][41][42][43][44][45][46], the composition of the wear-resistant (Ti 0.70 ,Al 0.25 ,Si 0.05 )N coating was chosen. This composition provides sufficient hardness and wear resistance, in combination with good adhesion to the substrate and resistance to brittle fracture.…”

Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates

“…The deposition temperature T D was 500-550°C. Additional information about the deposition process can be found in [19] and [20]. The single-crystalline Si substrates were strips of size 21 × 7 mm 2 , with thicknesses of 380 and 500 μm for (100) and 380 μm for (111) orientation.…”

Increased thermal stability of Ti1−xAlxN/TiN multilayer coatings through high temperature sputter deposition on powder-metallurgical high-speed steels

“…Three of its four unbalanced magnetrons (500 × 88 mm 2 ) were equipped with Ti-Al mosaic targets of type TiAl48 GM (described in more detail in Refs. [27] and [28]), while a pure Ti target was mounted on the fourth one. The substrates were ground and polished disks of the size Ø 30 × 10 mm made of PM-HSS grades Böhler S390PM (HS10-2-5-8 type) and S290PM (HS14-2.5-5-11 type), quenched and tempered to a hardness value of 67 ± 1 HRC, and rectangular Si (100) samples of 0.4 mm thickness.…”