A comparison of lamp control parameters in both bulk and depth profile analysis by glow discharge optical emission spectroscopy

Abstract

The impact of the glow discharge lamp control parameters (voltage, current and pressure) on the quality of the multi-matrix calibration curves, bulk check standard results and quantitative depth profile analysis is investigated. The lack of current and voltage stability is shown to have a larger influence on the quality of these results than do similar changes in pressure. Lamp control modes that achieve both constant current and constant voltage at the expense of constant pressure are found to be best for both multi-matrix bulk analysis and quantitative depth profile analysis.then utilized by the analyst for the characterization of both

Electrical measurements at radio frequency glow discharges for spectroscopy

“…the measurement of very thin layers. For measurements at constant pressure p and constant RF voltage (amplitude U A or the bias voltage U B ) [121,48], or at constant pressure p and RF power P [14,43,126] at different families of materials like steel, aluminum or brass the calibration curves show different slopes dependent on the type of material. This effect is called "family effect".…”

Radio frequency glow discharge optical emission spectroscopy: a new weapon in the depth profiling arsenal

“…Some of the earliest publications in the modern era (post-1970s) of GD spectroscopies clearly demonstrated the inherent capabilities for profiling of technical layers of >1 µm thickness [14,15]. Methods for controlling discharge atomization and excitation conditions are well characterized [16]. In addition, methods for quantification of depth profiles (i.e., conversion from the intensity vs. time format to concentration vs. depth) are very well established and integrated into all commercial GD-OES systems [17,18].…”

The analytical impact of power control in a radio frequency glow discharge optical emission plasma

“…No matter which approach is applied, it is well established that control of the discharge parameters, through appropriate control of the power supply, is key to obtaining good analytical results. [1][2][3][4][5][6][7] Still, there is some disagreement as to which of the various discharge parameters (current (i), voltage (E), power (W) or pressure (p)) are the most important in this regard. 2,[6][7][8][9] Few would argue that it is the plasma parameters (i, E, and p) that control, either directly or indirectly, all of the glow discharge plasma processes.…”