A comparison of surface metrology techniques

Conroy, Mike; Armstrong, J. H.

doi:10.1117/12.663390

Cited by 3 publications

(4 citation statements)

References 16 publications

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“…These include optical constants, surface slopes, fine surface features that cause diffraction, and deep valleys in which multiple scattering may occur. In addition, scattering from surfaces within the optical system produces stray light in the system that can affect the accuracy of the optical profiling method [9,10]. With such factors, it could be explained that why higher roughness results have been observed for optical profiler measurement.…”

Section: (4) Part Variation (Pv)mentioning

confidence: 96%

Surface roughness metrology study on flip-chip substrate

Ong¹,

Lim²,

Zhao³

et al. 2011

18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

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Section: (4) Part Variation (Pv)mentioning

confidence: 96%

Surface roughness metrology study on flip-chip substrate

Ong¹,

Lim²,

Zhao³

et al. 2011

18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

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“…The operator then has the choice between numerous coherent and non-coherent optical measuring principles like conventional interferometry, holography, whitelight interferometry, chromatic focus probing, fringe projection, lightsectioning, 3D confocal profilometry and z-stacking microscopy [1], [2]. Most of these techniques require multiple images to obtain the 3D surface information.…”

Section: Introductionmentioning

confidence: 99%

High speed 3D surface inspection with digital holography

Brunn

Aspert²,

Cuche³

et al. 2013

Eighth International Symposium on Precision Engineering Measurement and Instrumentation

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Digital holography has proven its ability to acquire high accuracy full field 3D data with one single image acquisition. This means that in principle this technique offers the chance to perform 3D serial inspection processes, as well. However, one limitation in digital holography is its limited ability to measure rough surfaces. In the presence of rough surfaces, the magnification of the image has to be increased to capture the required phase information on each camera pixel. However, this leads to significant reduction of inspection speed. If low magnification is selected, the rough surface produces speckles which cannot be treated properly by digital holography algorithms. In this paper, we describe the extension of digital holography to rough surface applications using speckle interferometry technique. This technique is capable of fast inspection of rough surfaces with sub-micrometer accuracy. The principle of this approach is shown and a practical application for 3D surface inspection of wafer cutting processes is given.

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“…The light reflected on the surface and its subsequent detection allows the evaluation of the surface texture. Conroy et al [ 5 ] pointed out that the most widely used optical methods are interferometry and confocal microscopy (CM). The present work is focused on the second one, due to better adequacy when used in mechanical manufacturing environments.…”

Section: Introductionmentioning

confidence: 99%

“…Conroy et al [ 5 ] measure a specimen consisting of an 80 μm pitch square wave Al-coated etched grating with a nominal step height of 187 nm and use stylus profilometers (SP), confocal microscopy (CM), and interferometric microscopy (IM) in their comparison. They do not provide experimental results of the evaluated surface texture parameters nor employed algorithms and conclude that the use of any technique requires an understanding of the properties of the sample, limitations of the technique used, and the analysis required before carrying out the surface measurement.…”

Section: Introductionmentioning

confidence: 99%

Some Considerations about the Use of Contact and Confocal Microscopy Methods in Surface Texture Measurement

et al. 2018

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Surface metrology employs various measurement techniques, among which there has been an increase of noteworthy research into non-contact optical and contact stylus methods. However, some deeper considerations about their differentiation and compatibility are still lacking and necessary. This work compares the measurement characteristics of the confocal microscope with the portable stylus profilometer instrumentation, from a metrological point of view (measurement precision and accuracy, and complexity of algorithms for data processing) and an operational view (measuring ranges, measurement speed, environmental and operational requirements, and cost). Mathematical models and algorithms for roughness parameters calculation and their associated uncertainties evaluation are developed and validated. The experimental results demonstrate that the stylus profilometer presents the most reliable measurement with the highest measurement speed and the least complex algorithms, while the image confocal method takes advantage of higher vertical and horizontal resolution when compared with the employed stylus profilometer.

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A comparison of surface metrology techniques

Cited by 3 publications

References 16 publications

Surface roughness metrology study on flip-chip substrate

Surface roughness metrology study on flip-chip substrate

High speed 3D surface inspection with digital holography

Some Considerations about the Use of Contact and Confocal Microscopy Methods in Surface Texture Measurement

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