A Complementary Metal Oxide Semiconductor (CMOS) Compatible Capacitive Silicon Accelerometer with Polysilicon Rib-Style Flexures

Abstract

A brief review of established methods shows that only with the Berthelot technique is it possible to see a finite volume of liquid in sustained mechanical tension. A short discussion of the practice and theory reveals two uncertainties with the conventional technique : that of the determination of a true filling temperature, and the influence of compliance by the glass on the tension developed. A description is then given of a modified apparatus with which these difficulties do not arise. The tube is formed into a coil which deflects sufficiently to indicate internal pressure or tension, and by monitoring these deflections with a distance meter a record of pressure/ tension against temperature can be made. The course of a typical run is shown from which the excess pressure, filling temperature and limiting tension may all be estimated with much greater precision than befoie. The orders of magnitude of the results obtained are indicated, and a possible influence of non-uniform gaseous supersaturation is suggested.

Multi-Physics Simulation Platform and Multi-Layer Metal Technology for CMOS-MEMS Accelerometer with Gold Proof Mass

“…We also have established modules (I) and (II) by extending our previous work reported elsewhere [29]; likewise, modules (III), (IV), and (V) are interpreted using Eqs. (6) and (8). Meandering suspensions are used in this chapter to lower the elastic rigidity in the direction normal to the chip surface.…”

“…Microelectromechanical systems (MEMS) capacitive accelerometers have been widely used in application fields such as mobile devices, air bag ignition for vehicles, and vital sign monitoring systems [1][2][3][4][5][6][7][8][9][10]. Also, in the progress of the attractive Internet of the Thing (IoT) technology, MEMS accelerometers have played an important role in key devices.…”

Integrated CMOS-MEMS Technology and Its Applications

“…[7] [8] where m is the proof mass, G in is the input acceleration value measured in gravitational acceleration (1 G= 9.8 m/s 2 ), k is the total spring constant of the mechanical suspensions, and c is the damping coefficient of the suspended structures including the viscosity of the air. Figure 3 shows the equivalent circuit for the MEMS accelerometer unit implemented in Cadence Virtuoso(24), which is widely used as the standard tool for LSI design.…”

“…We also have newly developed modules (I) and (II) by extending our multi-physics simulation (16); Likewise, modules (III), (IV), and (V) are interpreted using Eqs. [6] and [8]. Meandering suspensions are used to lower the elastic rigidity in the direction normal to the chip surface.…”

Novel Sensor Structure and Its Evaluation for Integrated Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer

“…In recent years, various types of accelerometers have been developed [1][2][3][4][5][6][7][8][9][10][11][12] and widely used tools in our daily life such as mobile electronic devices, sports gear, and motor vehicles. This implies that the smaller the sensor systems become, the wider the application area of accelerometers will grow, and there is still much room for exploration.…”