A Compliant Self-Stabilization Nanopositioning Device With Modified Active–Passive Hybrid Vibration Isolation Strategy

Zhu, Zhongyuan; Tang, Hui; Huang, Yunwei; Lin, Zhihang; Tian, Yanling; Yu, Peng; Su, Chanmin

doi:10.1109/tmech.2023.3265329

Cited by 15 publications

(5 citation statements)

References 34 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Through coupling the 4BSL and the IORFH, a novel zero-stiffness flexure hinge was devised. Zhu [27] proposed a two-degree-of-freedom seismic system model based on a smooth discontinuous oscillator. The model comprised two horizontally and orthogonally oriented vibration isolators, each exhibiting stable QZS characteristics, thereby reducing the initial isolation frequency to below 0.5 Hz.…”

Section: Linear Spring As Negative Stiffness Mechanismmentioning

confidence: 99%

See 1 more Smart Citation

Magnetic Negative Stiffness Devices for Vibration Isolation Systems: A State-of-the-Art Review from Theoretical Models to Engineering Applications

Zhu,

Chai

2024

Applied Sciences

View full text Add to dashboard Cite

This paper presents a comprehensive state-of-the-art review of magnetic negative stiffness (MNS) devices in the realm of vibration isolation systems, spanning from foundational theoretical models to practical engineering applications. The emergence of MNS technology represents a significant advancement in the field of vibration isolation, introducing a method capable of achieving near-zero stiffness to effectively attenuate low-frequency vibration. Through a systematic exploration of the evolution of vibration isolation methodologies—encompassing passive, active, and hybrid techniques—this article elucidates the underlying principles of quasi-zero stiffness (QZS) and investigates various configurations of MNS isolators, such as the linear spring, bending beam, level spring-link, and cam-roller designs. Our comprehensive analysis extends to the optimization and application of these isolators across diverse engineering domains, highlighting their pivotal role in enhancing the isolation efficiency against low-frequency vibrations. By integrating experimental validations with theoretical insights, this study underscores the transformative potential of MNS devices in redefining vibration isolation capabilities, particularly in expanding the isolation frequency band while preserving the load-bearing capacities. As the authors of this review, not only are the current advancements within MNS device research cataloged but also future trajectories are projected, advocating for continued innovation and tailored designs to fully exploit the advantages of MNS technology in specialized vibration isolation scenarios.

show abstract

Section: Linear Spring As Negative Stiffness Mechanismmentioning

confidence: 99%

“…Hybrid systems: Recently, hybrid techniques combining passive and active elements have gained popularity [27][28][29]. These systems utilize a combination of passive damping materials, mechanical systems, and active control mechanisms to achieve optimal vibration isolation.…”

Section: Introductionmentioning

confidence: 99%

Magnetic Negative Stiffness Devices for Vibration Isolation Systems: A State-of-the-Art Review from Theoretical Models to Engineering Applications

Zhu,

Chai

2024

Applied Sciences

View full text Add to dashboard Cite

show abstract

“…To achieve rotational movement around the X -axis, a cross-axis flexural pivot can be used. This type of pivot has been extensively studied and modeled in previous research as cited in [ 11 , 22 , 24 ]. For this particular study, we selected this compliant module to provide rotational freedom around the X -axis.…”

Section: Design Principle Of Mechanismmentioning

confidence: 99%

“…Considering these issues, compliant connection mechanisms have been proposed to align the printing platform and mitigate the adverse effects of temperature rises. Compliant connection mechanisms offer frictionless operation, precision, and durability, making them a common choice in robotics manufacturing and precision instrument applications [ 8 , 9 , 10 , 11 ].…”

Section: Introductionmentioning

confidence: 99%

A Novel Compliant Connection Mechanism with Thermal Distortion Self-Elimination Function

Huang,

Liao,

Lin

et al. 2024

Micromachines

Self Cite

View full text Add to dashboard Cite

As a novel technology for fabricating large-screen OLED devices, OLED inkjet printing places extreme demands on the positioning accuracy of inkjet printing platforms. However, thermal deformation of the connection mechanism often reduces the printing precision of OLED printing equipment, significantly impacting overall print quality. This study introduces a compliant connection mechanism that achieves precise positioning of the inkjet printing platform and can self-eliminate thermal distortion. The design of the mechanism’s core component is based on the Freedom and Constraint Topology (FACT) principle. This component is constructed from three distinct compliant sections arranged in series, collectively providing three degrees of freedom. Furthermore, the resistance to deformation caused by gravity and other external forces was evaluated by analyzing both vertical and horizontal stiffness. To validate the mechanism’s thermal distortion elimination and gravity resistance capabilities, finite element analysis (FEA) was carried out. The results demonstrate that the mechanism effectively reduces the maximum deformation of the platform by approximately 46% and the average deformation across the entire platform by approximately 59%. These findings confirm that the mechanism has potential in high-precision positioning tasks that need to mitigate thermal distortion.

show abstract

“…Submicron and even nanometer-level accuracy alignment systems are essential for various applications, such as wafer-level manufacturing and inspection, mass transfer and packaging of microminiaturized semiconductor products, robotic micro/nanomanipulations, and precision optical device polishing, etc. [1][2][3][4]. However, traditional high-precision motion systems with 3-DoFs (XYZ) fail to account for pitch, yaw, and small angular deviations [5].…”

Section: Introductionmentioning

confidence: 99%

Design and Testing of a Compliant ZTTΘ Positional Adjustment System with Hybrid Amplification

Liao,

Lin,

Tang

et al. 2024

Micromachines

Self Cite

View full text Add to dashboard Cite

This article presents the design, analysis, and prototype testing of a four-degrees-of-freedom (4-DoFs) spatial pose adjustment system (SPAS) that achieves high-precision positioning with 4-DoFs (Z/Tip/Tilt/Θ). The system employs a piezoelectric-driven amplification mechanism that combines a bridge lever hybrid amplification mechanism, a double four-bar guide mechanism, and a multi-level lever symmetric rotation mechanism. By integrating these mechanisms, the system achieves low coupling, high stiffness, and wide stroke range. Analytical modeling and finite element analysis are employed to optimize geometric parameters. A prototype is fabricated, and its performance is verified through testing. The results indicate that the Z-direction feed microstroke is 327.37 μm, the yaw motion angle around the X and Y axes is 3.462 mrad, and the rotation motion angle around the Z axis is 12.684 mrad. The x-axis and y-axis motion magnification ratio can reach 7.43. Closed-loop decoupling control experiments for multiple-input-multiple-outputs (MIMO) systems using inverse kinematics and proportional-integral-derivative feedback controllers were conducted. The results show that the Z-direction positioning accuracy is ±100 nm, the X and Y axis yaw motion accuracy is ±2 μrad, and the Z-axis rotation accuracy is ±25 μrad. Due to the ZTTΘ mechanism, the design proved to be feasible and advantageous, demonstrating its potential for precision machining and micro-nano manipulation.

show abstract

A Compliant Self-Stabilization Nanopositioning Device With Modified Active–Passive Hybrid Vibration Isolation Strategy

Abstract: How to cite:Please refer to published version for the most recent bibliographic citation information. If a published version is known of, the repository item page linked to above, will contain details on accessing it.

Cited by 15 publications

References 34 publications

Magnetic Negative Stiffness Devices for Vibration Isolation Systems: A State-of-the-Art Review from Theoretical Models to Engineering Applications

Magnetic Negative Stiffness Devices for Vibration Isolation Systems: A State-of-the-Art Review from Theoretical Models to Engineering Applications

A Novel Compliant Connection Mechanism with Thermal Distortion Self-Elimination Function

Design and Testing of a Compliant ZTTΘ Positional Adjustment System with Hybrid Amplification

Contact Info

Product

Resources

About