A Composite Adaptive Controller Design for 3-DOF MEMS Vibratory Gyroscopes Capable of Measuring Angular Velocity

Ranjbar, Ehsan; Suratgar, Amir Abolfazl

doi:10.1007/s40998-018-0101-5

Cited by 14 publications

(7 citation statements)

References 27 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Moreover, transient response was improved by applying magnitude constraints. To focus on the same issue as in [13], an adaptive force balancing control of the MEMS gyroscope by using the trajectory-switching algorithm was presented in [14]. The proposed technique in [14] identified and reduced the zero-rate output due to cross-damping terms.…”

Section: Introductionmentioning

confidence: 99%

Robust tracking and consensus control of a MEMS gyroscope multi-agent systems with H-infinity performance: A transfer function approach

Nasir

Ahmed

Aslam

et al. 2022

Preprint

View full text Add to dashboard Cite

Microelectromechanical system (MEMS) devices face unique issues of control and measurement in contrast to conventional devices due to smaller size, lower manufacturing cost, and less power utilization. A MEMS gyroscope multi-agent system is one example of a MEMS device which have many industrial applications. Despite the significant industrial applications of MEMS gyroscope multi-agent systems such as airbag filling systems, stabilization of image, etc., it faces problems of stability and performance due to the existence of external disturbances, noise, and variations in the parameters. So, designing a consensus controller in the presence of uncertainties and disturbances is a challenging task. The basic purpose of this work is to investigate the issues faced by the MEMS gyroscope multi-agent system and propose a non-linear robust tracking and consensus control technique for the drive axis of the multi-agent system MEMS gyroscope. For this purpose, a controller is designed for the robust tracking and consensus control of MEMS gyroscope multi-agent system by the combination of H∞ consensus control and dynamic surface control approaches. The proposed H∞ consensus controller minimizes the external disturbance effects, makes the drive axis achieve resonance, and a tuning method is derived to tune the output response of the drive axis to the desired level. Further, we simulated a closed-loop system to discuss the controller features. In the last part of the paper, simulation examples are presented to verify the effectiveness of the proposed controller in the presence of uncertainties

show abstract

Section: Introductionmentioning

confidence: 99%

Robust tracking and consensus control of a MEMS gyroscope multi-agent systems with H-infinity performance: A transfer function approach

Nasir

Ahmed

Aslam

et al. 2022

Preprint

View full text Add to dashboard Cite

show abstract

“…The main drive control methods for MEMS gyroscopes include self-excited oscillation control (Xia et al , 2011), phase-locked loop (PLL) control (Wang et al , 2013; Xia et al , 2016; Su et al ,2020) and adaptive control (Ranjbar and Suratgar, 2019). Although the method of self-excited oscillation control is simple, it is difficult to achieve high-precision frequency tracking.…”

Section: Introductionmentioning

confidence: 99%

A method to improve tracking ability of drive control of MEMS gyroscopes

Chen

Zhu

Mou

et al. 2021

View full text Add to dashboard Cite

Purpose A high-precision gyroscope is an important tool for accurate positioning, and the amplitude stability and frequency tracking ability of the drive control system are important and necessary conditions to ensure the precision of micro-electro-mechanical systems (MEMS) gyroscopes. To improve the precision of MEMS gyroscopes, this paper proposes a method to improve the amplitude stability and frequency tracking ability of a drive control system. Design/methodology/approach A frequency tracking loop and an amplitude control loop are proposed to improve the frequency tracking ability and amplitude stability of the drive control system for a MEMS gyroscopes. The frequency tracking loop mainly includes a phase detector, a frequency detector and a loop filter. And, the amplitude control loop mainly includes an amplitude detector, a low-pass filter and an amplitude control module. The simulation studies on the frequency tracking loop, amplitude control loop and drive control system composed of these two loops are implemented. The corresponding digital drive control algorithm is realized by the Verilog hardware description language, which is downloaded to the application-specific integrated circuits (ASIC) platform to verify the performances of the proposed method. Findings The simulation experiments in Matlab/Simulink and tests on the ASIC platform verify that the designed drive control system can keep the amplitude stable and track the driving frequency in real time with high precision. Originality/value This study shows a way to design and realize a drive control system for MEMS gyroscopes to improve their tracking ability. It is helpful for improving the precision of MEMS gyroscopes.

show abstract

“…Nevertheless, control application to the MEMS VRS is required since it could play an efficacious role for establishing long-lasting stability and veracity of reference voltage. Application of efficient control approaches for MEMS, robots and other mechatronic systems to engender error downturn and boosted performance is a noticeable challenge for researchers studying in the field of control engineering application [1,9,19,21,28]. Adaptive and robust control approaches have been drawing the researchers' curiosity and attention since deficiencies and irregularities in MEMS modeling as well as ambivalence in different parameters arise in the manufacturing procedures [8,10,11,29].…”

Section: Introductionmentioning

confidence: 99%

Design of an adaptive sliding mode controller with a sliding mode Luenberger observer for the MEMS capacitive plates

Ranjbar

Suratgar

2020

SN Appl. Sci.

Self Cite

View full text Add to dashboard Cite

Uncertain parameters in a MEMS tunable capacitor, as one of the fundamental elements in a MEMS AC voltage reference source (VRS) structure, is an important issue for acquisition of a rigorous voltage in the VRS output. The output is mostly supposed to be destroyed by harmful disturbance and noise. Even though the manufacturers make attempts to build MEMS tunable capacitor with desired characteristics in thorough compliance with the initial major design, uncertainties in the parameters inescapably do exist in manufacturing process on the ground of deficiencies in various procedures. This paper mainly remarks an adaptive sliding mode controlling design with a sliding mode Luenberger observer and its application for a MEMS tunable capacitor. The control design is done considering matched and unmatched terms of uncertainties and disturbance. The advantageous outcome is that the VRS could be generating a stable precise regulated output voltage owing to correct distance adjustment of the capacitor charged plates. The design exploits the sliding mode observer to get rid of extra usage of plate position measurement in the control structure. The controller alleviates the system output of the matched and unmatched disturbance which could exist dynamically because of cross stiffness and damping in addition to other inertial and electrostatic disturbing forces. The matched uncertainties, such as stiffness and damping change, might appear due to variation in fabrication procedures or working condition. The simulation yields are satisfactory and depict a persuasive tracking performance as well as regulation about the pull-in point.

show abstract

A Composite Adaptive Controller Design for 3-DOF MEMS Vibratory Gyroscopes Capable of Measuring Angular Velocity

Cited by 14 publications

References 27 publications

Robust tracking and consensus control of a MEMS gyroscope multi-agent systems with H-infinity performance: A transfer function approach

Robust tracking and consensus control of a MEMS gyroscope multi-agent systems with H-infinity performance: A transfer function approach

A method to improve tracking ability of drive control of MEMS gyroscopes

Design of an adaptive sliding mode controller with a sliding mode Luenberger observer for the MEMS capacitive plates

Contact Info

Product

Resources

About