The low-temperature plasma nitriding was utilized to describe the microscopic solid-phase separation in the austenitic stainless-steel type AISI316, induced by the nitrogen supersaturation. This nitrogen supersaturated layer with the thickness of 60 μm had a two-phase nanostructure where the nitrogen-poor and nitrogen-rich clusters separated from each other. Due to this microscopic solid-phase separation, iron and nickel atoms decomposed themselves from chromium atoms and nitrogen solutes in this nitrogen supersaturated AISI316 layer. These microscopic cluster separation and chemical decomposition among the constituent elements in AISI316 were induced in the multi-dimensional scale by the plastic straining along the slip lines in the (111)-orientation from the surface to the depth of matrix. The nitrogen solute diffused through the cluster boundaries into the depth. With the aid of masking technique, this nitrogen supersaturation and nanostructuring was controlled to take place only in the unmasked AISI316 matrix. The nanostructures with two separated clusters were mesoscopically embedded into AISI316 matrix after the masking micro-textures. This microscopic and mesoscopic structure control was available in surface treatment of multi-host metals such as superalloys and high entropy alloys.