A comprehensive study of stability in an electro-statically actuated micro-beam

Mobki, Hamed; Rezazadeh, Ghader; Sadeghi, Mostafa; Vakili‐Tahami, Farid; Fakhrabadi, Mir Masoud Seyyed

doi:10.1016/j.ijnonlinmec.2012.08.002

Cited by 50 publications

(26 citation statements)

References 19 publications

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“…This phenomenon, known as pull-in instability, is a subject of prime importance in the design of MEMS devices [29]. In this paper, we define the critical temperature variation when the micro-beam collapses only subjected to the temperature change as the "pull-in temperature variation", and the critical voltage corresponding to the micro-beam under the application of V 0 and temperature change as "pull-in voltage".…”

Section: Fgm Beam Modelmentioning

confidence: 99%

Thermal effect on the pull-in instability of functionally graded micro-beams subjected to electrical actuation

Jia

Zhang

et al. 2014

Composite Structures

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Thermal effect on the pull-in instability of functionally graded micro-beams subjected to electrical actuation, Composite Structures (2014), doi: http://dx.doi.org/10. 1016/j.compstruct.2014.05.004 This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain.Thermal effect on the pull-in instability of functionally graded micro-beams subjected to electrical actuation Abstract. The thermal effect on the pull-in instability of functionally graded micro-beams under the combined electrostatic force, temperature change and Casimir force is studied based on Euler-Bernoulli beam theory and von Kármán geometric nonlinearity. Take into consideration the temperaturedependency of the effective material properties, the Voigt model and exponential distribution model is used to simulate the material properties of the functionally graded materials (FGMs). Principle of virtual work is used to derive the nonlinear governing differential equation which is then solved using the differential quadrature method (DQM). A parametric study is conducted to show the significant effects of material composition, temperature change, geometric nonlinearity and Casimir force. Keywords:Functionally graded materials; Micro-beam; Temperature change; Pull-in instability; Casimir force * Corresponding author, Ph. D, E-mail address: xljia@cup.edu.cn Tel: +86 10 89733762 IntroductionMicro-Electro-Mechanical Systems (MEMS) can be defined as systems of small dimensions fulfilling a smart function. The devices are typically designed to operate in one or more energy domains due to their unique advantages such as small size, lower power consumption, lower operation cost, increased reliability and higher precision. With MEMS are used more and more widely due to their unique advantages, such as small size, lower power consumption, lower operation cost, increased reliability and higher precision, numerous analytical, numerical and experimental studies have been conducted on the pull-in instability of the MEMS devices [1][2][3][4][5].Most recently, the use of functionally graded materials (FGMs) in MEMS structures has been proposed by Craciunescu and Wuttig [6] and Fu et al. [7], since FGMs offer many advantages including improved stress distribution, enhanced thermal resistance, higher fracture toughness, and reduced stress intensity factors that make them very attractive in many engineering applications [8]. Specially, Witvrouw and his co-workers [9, 10] developed a multilayer polySiGe deposition process for fabricating MEMS structural layers that fulfill all material and economical requirements.Along with the development of technology, MEMS are expected to ...

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Section: Fgm Beam Modelmentioning

confidence: 99%

Thermal effect on the pull-in instability of functionally graded micro-beams subjected to electrical actuation

Jia

Zhang

et al. 2014

Composite Structures

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“…Comprehensive stability analysis of three plate micro switch subjected to electrostatic force has been presented in ref. [36]. Azizi et al [37] studied bifurcation Behavior of a Capacitive three layer microswitch.…”

Section: Introductionmentioning

confidence: 99%

Investigation of dynamic instability of three plates switch under step DC voltage actuation using modified couple stress theory

Fard

Gharechahi

Fard

et al. 2018

Lat. Am. j. solids struct.

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In this paper dynamical instability of three-layer micro-switch under DC voltage actuation has been studied. Recent studies have used the classical beam theory while leaving out the length scale parameter. In this paper dynamic behavior of the switch has been investigated based on couple stress theory and considering the length scale parameter. To this end, governing dynamic equation of the micro switch has been extracted and presented. Considering the nonlinearity of governing equation due to the existence of electrostatic force, Galerkin method has been implemented to overcome this nonlinearity and solve the mentioned equation and obtain the dynamic response. Dynamic response of micro switch has been investigated with and without considering the damping effects. Variation of dynamic pull-in voltage versus micro beam length and primary gap between micro beam and stationary electrodes have been studied using couple stress and classic beam theory and obtained results have been compared to each other. Also dependency of dynamic pull-in voltage to damping factor has been studied with considering two theories. Furthermore switching time of micro switch have been determined and compared using couple stress and classic beam theories.

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“…The resonators are a new type of electronic components which can oscillate in very high frequencies. A double-side resonator is a new type of resonators, composed of a movable electrode, placed between two conductive substrates (Mobki et al 2013;Azimloo et al 2014). Applying an external voltage difference between the moveable electrode and the substrates induces an electrostatic field which attracts the moveable electrode into the substrates (Mobki et al 2013).…”

Section: Introductionmentioning

confidence: 99%

Nonlinear oscillation of nanoelectro-mechanical resonators using energy balance method: considering the size effect and the van der Waals force

Ghalambaz

Edalatifar

2015

Appl Nanosci

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The energy balance method is utilized to analyze the oscillation of a nonlinear nanoelectro-mechanical system resonator. The resonator comprises an electrode, which is embedded between two substrates. Two types of clamped-clamped and cantilever nano-resonators are studied. The effects of the van der Waals attractions, Casimir force, the small size, the fringing field, the mid-plane stretching, and the axial load are taken into account. The governing partial differential equation of the resonator is reduced using the Galerkin method. The energy method is applied to obtain an analytical solution without considering any linearization or small parameter. The results of the present study are compared with the results available in the literature. In addition, the results of the present analytical solution are compared with the Runge-Kutta numerical results. An excellent agreement between the present analytical solution, numerical solution, and the results available in the literature was found. The influences of the van der Waals force, Casimir force, size effect, and fringing field effect on the oscillation frequency of resonators are studied. The results indicate that the presence of the intermolecular forces (van der Waals), Casimir force, and fringing field effect decreases the oscillation frequency of the resonator.In contrast, the presence of the size effect increases the oscillation frequency of the resonator.

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A comprehensive study of stability in an electro-statically actuated micro-beam

Cited by 50 publications

References 19 publications

Thermal effect on the pull-in instability of functionally graded micro-beams subjected to electrical actuation

Thermal effect on the pull-in instability of functionally graded micro-beams subjected to electrical actuation

Investigation of dynamic instability of three plates switch under step DC voltage actuation using modified couple stress theory

Nonlinear oscillation of nanoelectro-mechanical resonators using energy balance method: considering the size effect and the van der Waals force

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