2017
DOI: 10.1016/j.triboint.2016.10.007
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A computational stochastic multiscale methodology for MEMS structures involving adhesive contact

Abstract: This work aims at developing a computational stochastic multiscale methodology to quantify the uncertainties of the adhesive contact problems due to capillary effects and van der Waals forces in MEMS. Because the magnitudes of the adhesive forces strongly depend on the surface interaction distances, which in turn evolve with the roughness of the contacting surfaces, the involved structural behaviors suffer from a scatter. To numerically predict the probabilistic behaviors of structures involving adhesion, the … Show more

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Cited by 12 publications
(25 citation statements)
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References 65 publications
(170 reference statements)
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“…To quantify the uncertainty of MEMS structures subjected to stiction, the stochastic model-based multi-scale method developed by the authors in [30] is applied. The generated samples of the contacting surfaces obtained using the generator developed in Sec.…”
Section: A Multi-scale Stochastic Framework For Adhesive Contactmentioning
confidence: 99%
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“…To quantify the uncertainty of MEMS structures subjected to stiction, the stochastic model-based multi-scale method developed by the authors in [30] is applied. The generated samples of the contacting surfaces obtained using the generator developed in Sec.…”
Section: A Multi-scale Stochastic Framework For Adhesive Contactmentioning
confidence: 99%
“…Although the uncertainty characteristics [30], [31], [27], [26] and the non-Gaussianity of the surface height distribution [5], [32], [33] play important roles in the stiction phenomenon, they were either both neglected or accounted for but individually. On the one hand, in [5], the importance of non-Gaussian properties including the skewness and the kurtosis of the contacting surface heights was illustrated by a comparison between numerical predictions and experimental results; however, only deterministic predictions were given.…”
Section: Introductionmentioning
confidence: 99%
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