A continuously tunable size-based filter

Abstract

In this paper we present a MEMS filter with continuously tunable pore size using a mirosieve-couple structure. The shape of the pore can be rectangular or square, while the size of the pore can be continuously tuned from a few microns to 200 microns dynamically. As far as we know, this is the largest tunable range among all the reported cell or microparticle sorters. The functionality of the tunable pore filter is validated using microbeads.