2007
DOI: 10.1002/mop.22176
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A CPW linear resonator method for the microwave characterization of high dielectric constant films

Abstract: A coplanar waveguide linear resonator technique for the experimental characterization of the dielectric properties of films in the microwave frequency range at room temperature is proposed. The approach is simple to implement as it consists of a film with unknown high

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Cited by 6 publications
(10 citation statements)
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“…Its relative dielectric constant and loss tangent values equal to 150 and 0.23, respectively, were measured using the linear resonator technique described previously in [8]. As previously mentioned, these measured values have been confirmed in this article using time domain measurements.…”
Section: Structure Descriptionsupporting
confidence: 79%
“…Its relative dielectric constant and loss tangent values equal to 150 and 0.23, respectively, were measured using the linear resonator technique described previously in [8]. As previously mentioned, these measured values have been confirmed in this article using time domain measurements.…”
Section: Structure Descriptionsupporting
confidence: 79%
“…The height and width of the substrate are, respectively H = 635 μm and A = 5.0 mm. The conventional cross‐section of the resonators used in previous simulations of this method [18, 19] is shown in Figure 1(a). However, it cannot be applied when RF sputtered thin films are considered because the film layer follows the conductor contour.…”
Section: Structure Descriptionmentioning
confidence: 99%
“…The technique is based on the resonance properties of the resonator [18, 19]. Comparison between measured results and theoretical predictions of transmission characteristics with frequency yields the determination of the dielectric properties of the film.…”
Section: Structure Descriptionmentioning
confidence: 99%
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