A critical comparison between XRD and FIB residual stress measurement techniques in thin films

Bemporad, Edoardo; Brisotto, Mariangiola; Depero, Laura E.; Gelfi, Marcello; Korsunsky, Alexander M.; Lunt, Alexander J.G.; Sebastiani, Marco

doi:10.1016/j.tsf.2014.09.053

Cited by 65 publications

(34 citation statements)

References 22 publications

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“…8(b). Fine-scale Pt patterns have been used extensively in the literature for DIC on SEM images [39,40]. Here, however, the Pt pattern has been optimized (in terms of speckle size and contrast) to yield the maximum displacement resolution for DIC applied to optical profilometry images, which explains the choice for a much coarser pattern with smooth edges of the speckles.…”

Section: Force and Displacement Measurement And Stress-strain Curvementioning

confidence: 99%

A Uni-Axial Nano-Displacement Micro-Tensile Test of Individual Constituents from Bulk Material

Hoefnagels

Bergers

et al. 2017

Exp Mech

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For both single-phase and multiphase metallic materials, it is necessary to understand the mechanical behavior on the grain-size scale in detail to get information that is not obtainable from macro-scale mechanical characterizations. This paper presents a methodology for uniaxial tensile testing of micro-specimens isolated from a bulk material. The proposed concept of multiple parallel micro-tensile specimens at the tip of a macro-sized wedge reduces the alignment work and offers an easy way for specimen handling. The selection of site-specific specimens is based on detailed microstructural and crystallographic characterization. Three kinds of representative specimens are presented to illustrate the wide range of application of the methodology for a variety of materials. Accurate, reproducible measurement of force (2.5 μN resolution) and displacement (~10 nm resolution) is demonstrated, while accurate alignment (in-plane rotational and out-of-plane tilt misalignment of <0.2°) limits the stress due to bending to <0.2% of the imposed uni-axial stress. Combined with detailed material characterization on both sides of the microspecimens, this method yields detailed insights into the micro-mechanics of bulk materials which is hard to obtain from traditional macro-mechanical tests.

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Section: Force and Displacement Measurement And Stress-strain Curvementioning

confidence: 99%

A Uni-Axial Nano-Displacement Micro-Tensile Test of Individual Constituents from Bulk Material

Hoefnagels

Bergers

et al. 2017

Exp Mech

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“…It is a great challenge to conduct a reliable modeling and measurement for the residual stress of micro and nanostructured thin films. In order to realize the residual stress in a manner that considers the mechanical anisotropy and the preferred orientation of the materials, the detailed understanding of strain function corresponding to the depth lattice is required when analyzing depth profiles of residual strain [1].…”

Section: Introductionmentioning

confidence: 99%

“…This situation could generate localization distortions in the displacement fields obtained from the images analyzed by DIC [17]. Despite many research studies on the DIC of SEM [1,2,4,[13][14][15][16], the computational accuracy and the speed of advancement are always the major subjects. Prior to this, a study was performed on the validation methodology of DIC for SEM to reduce errors and use it for strain and surface deformation measurement of Complementary Metal-Oxide-Semiconductor Integrated Circuit (CMOS IC) samples.…”

mentioning

confidence: 99%

Using Digital Image Correlation on SEM Images of Strain Field after Ion Beam Milling for the Residual Stress Measurement of Thin Films

et al. 2020

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The residual stress of thin films during the deposition process can cause the components to have unpredictable deformation and damage, which could affect the service life and reliability of the microsystems. Developing an accurate and reliable method for measuring the residual stress of thin films at the micrometer and nanometer scale is a great challenge. To analyze the residual stress regarding factors such as the mechanical anisotropy and preferred orientation of the materials, information related to the in-depth lattice strain function is required when calculating the depth profiles of the residual strain. For depth-resolved measurements of residual stress, it is strategically advantageous to develop a measurement procedure that is microstructurally independent. Here, by performing an incremental focused ion beam (FIB) ring-core drilling experiment with various depth steps, the digital image correlation (DIC) of the specimen images was obtained. The feasibility of DIC to FIB images was evaluated after the translation test, and an appropriate procedure for reliable results was established. Furthermore, the condition of the film in the function of residual stress was assessed and compared to elucidate the applicability of this technology.

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“…Many of researchers focused their search on how to measure the residual stresses, distortions and concluded that the measurements techniques of residual stresses divided to destructive technique such as hole drilling method [3,4] and nondestructive techniques including neutron diffraction, magneto-elastic , X-Ray [5][6][7] and analytical method. However, all of these methods are very complicated and costly.…”

Section: Introductionmentioning

confidence: 99%

Numerical Simulation to Study the Influence of Welding Sequence on Distortion and Residual Stresses of Butt-Welded Plates

El-shrief

Saber

Nassef

et al. 2016

Port-Said Engineering Research Journal

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In many accurate industries such as gas turbine and aerospace, welding technique is used to weld thin parts during the assembling process. Due to uneven heating and cooling during the welding process, welded parts are prone to sever distortions and/or non-desirable residual stresses. The distortion causes problem in shape in assembly and when residual stresses combined with applied stresses, unexpected failure occurs. In this paper, three dimensional sequentially thermo-mechanical analysis is used to simulate welding process in Nical base super alloy plates (INCONEL718) for predicting the temperature field, distortion and residual stresses. The study was carried out on butt welded joint with 2 mm thickness, using the commercial Finite Element (FE) package (ABAQUS). The obtained results are compared with the numerical and experimental results obtained by other researchers. Good accordance is found between them. In order to control the distortion, it was proposed to carry out the welding process on several steps with different sequences. The cases of the welding sequences are: one step in one direction, two steps in opposite directions and four steps in two directions the study successfully predicted temperature and residual stress in the welded plates. Moreover, it was found that the more the steps of the welding process the less the distortion takes place in the plates.

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A critical comparison between XRD and FIB residual stress measurement techniques in thin films

Cited by 65 publications

References 22 publications

A Uni-Axial Nano-Displacement Micro-Tensile Test of Individual Constituents from Bulk Material

A Uni-Axial Nano-Displacement Micro-Tensile Test of Individual Constituents from Bulk Material

Using Digital Image Correlation on SEM Images of Strain Field after Ion Beam Milling for the Residual Stress Measurement of Thin Films

Numerical Simulation to Study the Influence of Welding Sequence on Distortion and Residual Stresses of Butt-Welded Plates

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