Deposition methods for the self-aligned growth of organometallic charge-transfer complexes for use as a conductivity-modulated, nonvolatile switching layer are presented. First, a deposition from liquid phase is investigated and a model for film growth is derived. Then, a deposition technique for charge-transfer complexes, namely selective organic vapor-phase deposition, is introduced which excels in selectivity and homogeneity. In particular, silicon dioxide layers exposed to the precursor molecules during processing remain completely uncovered, whereas copper pads in contact holes are rapidly filled with the desired layer of the charge-transfer complex. Then, both deposition methods are compared regarding reproducibility, selectivity, homogeneity, and the ability to selectively grow thin films in small structures with diameters below 200 nm. Finally, electrical switching properties are investigated and the switching mechanism for the present charge-transfer complex is discussed.As prospective successors for flash or dynamic random-access memory, several new concepts for data storage have been intensively studied in recent years. Conductivity-modulated memory designs experienced a major focus of investigation. Conductivitymodulated memory technologies include magnetoresistive randomaccess memory ͑RAM͒, 1,2 programmable metallization cell memory or conductive-bridging RAM, 3,4 and chalcogenide-based phasechange memory, 5 as well as organic memory concepts, 6,7 which employ a layer of organic or organometallic material to achieve reversible, nonvolatile conductivity switching.One of the most promising organic memory technologies incorporates the charge-transfer complex coppertetracyanoquinodimethane ͑CuTCNQ͒ as the active layer and was first described by Potember et al. [8][9][10] Charge-transfer ͑CT͒ complexes consist of an electron donor and an electron acceptor. In the case of CuTCNQ, the TCNQ molecule acts as the electron acceptor, while each copper atom is acting as an electron donor. However, a number of other metals and several electron-rich organic molecules have been investigated as feasible electron donors. 11,12 A characteristic property of a CT complex is the quantity of electron transfer, i.e., the extent to which donor electrons are transferred toward the electron acceptor. Due to a typically limited electron transfer, the bonds of a CT complex are weaker than covalent and even hydrogen bonds, but they are usually strong enough to build crystalline structure. 13 Resistance switching in thin films of CT complexes has been obtained by voltage pulses of different amplitudes and polarity, and switching times below 25 ns have been achieved. 8 Although the theory of operation for this kind of organometallic memory is not yet fully understood, it is assumed that the amount of electron transfer between the acceptor and donor, which determines the conductivity of a CT complex, can be permanently modulated under an electric field. 14,15 The conductivity of a CT complex is initially low because the donor electr...