Using focused ion beam and scanning electron microscopy, we investigated the effect of particulate contaminants on current leakage defects in organic light-emitting diode devices ͑200 nm thick organic layer͒. Flaked particles from sputtering targets and resist-related particles were investigated as examples of particulate contaminants. Three types of defects were identified corresponding to the dimensions and locations of the particulate contaminants. Large particles ͑Ͼ3 m in height͒ on the substrate formed short-circuit-type defects. They prevented an organic layer from being deposited on the anode, resulting in localized exposure of the anode surface. The cathode contacted the anode at these locations. Small particles ͑0.5-1.0 m in height and 1.0-3.0 m in length͒ on the substrate caused localized thinning at the places where the organic layer was deposited on the particles. This localized thinning of the organic layer apparently increased the Fowler-Nordheim tunneling current and the resultant avalanche multiplication, leading to leakage current. Very minute particles of lithium-oxide ͑Li 2 O͒ ͑0.03-0.05 m in diameter͒ in the cathode buffer layer caused current leakage. The local electric field concentration due to these minute particles and the resultant carrier injection is the possible cause of current leakage.Following the initial report, by Tang and Van Slyke, 1 organic light-emitting diodes ͑OLEDs͒ have attracted much attention for their potential use in next-generation display technologies. [2][3][4][5][6] OLEDs are amorphous thin solid film heterojunction devices constructed by vacuum evaporation of the transport layers onto a supporting electrode.Although they promise excellent device performance, OLED devices are difficult to manufacture and are subject to dark spot and current leakage defects. Dark spots are attributed to moisture and oxygen penetration. Device design ͑glass encapsulation, thin film passivation, etc.͒ has been the main approach to controlling them. 7 Current leakage defects are caused mainly by foreign particulate contaminants. Reducing these defects requires controlling particulate contamination over the entire fabrication process.Since the distance between the anode and cathode electrodes in OLED devices is very short, 100-200 nm, particulate contaminants left in the devices can easily cause current leakage defects. Even a single current leakage defect can prevent proper functioning of the device. In contrast to their thicknesses, conventional OLED panels have large surface areas. This means that particulate contaminants must be eliminated over a wide area, which makes it difficult to control current leakage defects in OLED devices.Despite the importance of controlling current leakage defects in OLED devices, there have been relatively few reports on their sources and mechanism. 8,9 In this study, we investigated the effect of particulate contamination on current leakage using focused ion beam ͑FIB͒ and scanning electron microscopy ͑SEM͒. As typical particulate contaminants formed ...