This paper proposes a circuit model of a cross-coupled CMOS AC–DC charge pump (XC–CP) operating in the subthreshold region. The aim is to improve the efficiency of designing XC–CPs with a variety of specifications, e.g., input and output voltages and AC input frequency. First, it is shown that the output resistance (Ro) of XC–CP is much higher than those of CPs with single diodes (SD–CP) and ultra-low-power diodes (ULPD–CP) as charge transfer switches (CTSs). Second, the reason behind the above feature of XC–CP, identified by a simple model, is that the gate-to-source voltages of CTS MOSFETs are independent of the output voltage of the CP. Third, the high but finite Ro of XC–CP is explainable with a more accurate model that includes the dependence of the saturation current of MOSFETs operating in the subthreshold region on the drain-to-source voltage, which is a function of the output voltage of CP. The model is in good agreement with measured and simulated results of XC–, SD–, and ULPD–CPs fabricated in a 250 nm CMOS.