2005
DOI: 10.1109/jmems.2004.840452
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A differential viscosity detector for use in miniaturized chemical separation systems

Abstract: Abstract-In this paper, we present a micromachined differential viscosity detector suitable for integration into an on-chip hydrodynamic chromatography system. The general design, however, is applicable to any liquid chromatography system that is used for separation of polymers. The micromachined part of the detector consists of a fluidic Wheatstone bridge and a low hydraulic capacitance pressure sensor of which the pressure sensing is based on optical detection of a membrane deflection. The stand-alone sensor… Show more

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Cited by 18 publications
(10 citation statements)
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“…7). A least-squares fit, using [ , 3 ] as the basis functions, is performed for each set of points (corresponding to different temperatures). This gives us the linear and cubic stiffnesses at different temperatures.…”
Section: Mechanical Parameters and Functionsmentioning
confidence: 99%
See 1 more Smart Citation
“…7). A least-squares fit, using [ , 3 ] as the basis functions, is performed for each set of points (corresponding to different temperatures). This gives us the linear and cubic stiffnesses at different temperatures.…”
Section: Mechanical Parameters and Functionsmentioning
confidence: 99%
“…Ilic et al [2] used MEMS oscillators as sensors for the detection of E. coli. Blom et al [3] successfully used MEMS oscillators to measure fluid density and viscosity. MEMS oscillators have also been used as reference oscillators [4] and to demonstrate signal processing [5] functions.…”
Section: Introductionmentioning
confidence: 99%
“…In order to overcome these technical limitations of conventional viscometers, several microfluidic devices have been proposed. [10][11][12][13] Nevertheless, these microfluidic platforms also require calibration procedures using a standard fluid as a reference. Moreover, additional procedures with intricate mathematical models are required to measure the viscosity of non-Newtonian fluids.…”
Section: Introductionmentioning
confidence: 99%
“…The problem is a subtle mix of pragmatism and technological limits. In addition to issues of dead volumes in standard pressure-measurement techniques (16)(17)(18) and those associated with interfacing microelectromechanical system devices to standard pressure gauges (19), existing techniques are simply difficult to implement [lasers, quadrant diodes, deformable membranes, multistep process of production (16)(17)(18)] and are unable to measure at millisecond rates the pressure changes in micrometer-scale flows. For instance, when a single red blood cell (RBC) enters a channel of 5 ϫ 5 m, the volume variation produced by a flow at physiological speeds of a few millimeters per second is Ϸ100 fL in a few milliseconds, which represents a typical pressure-drop variation of tens to hundreds of pascals.…”
mentioning
confidence: 99%