A double microbeam MEMS ohmic switch for RF-applications with low actuation voltage

Samaali, Hatem; Najar, Fehmi; Choura, Slim; Nayfeh, Ali H.; Masmoudi, Mohamed

doi:10.1007/s11071-010-9833-0

Cited by 32 publications

(20 citation statements)

References 26 publications

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“…In this paper, the applied DC voltages are lower than the pull-in voltage and 225 therefore the pull-out voltage (the voltage at which the micro-switch electrodes lose contact after pull-in occurs [31]) is not considered. The errors in the parameters of the MEMS model shown in Figure 1 are neglected.…”

Section: P) This Is the Case In The 140mentioning

confidence: 99%

An extended harmonic balance method based on incremental nonlinear control parameters

Khodaparast

Madinei

Friswell

et al. 2017

Mechanical Systems and Signal Processing

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General rightsThis document is made available in accordance with publisher policies. Please cite only the published version using the reference above. The application and verification of the method are illustrated using a non-linear Micro-Electro-Mechanical System (MEMS) subject to a base harmonic excitation. The non-linear control parameters in these examples are the DC voltages that are applied to the electrodes of the MEMS devices.

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Section: P) This Is the Case In The 140mentioning

confidence: 99%

An extended harmonic balance method based on incremental nonlinear control parameters

Khodaparast

Madinei

Friswell

et al. 2017

Mechanical Systems and Signal Processing

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“…The separatrix separates initial conditions that lead to stable solutions (bassin of attraction) to those leading to instable solutions (Samaali et al, 2011). In fact, we use time integration using the Runge-Kutta technique to determine the solution after long time when assuming a set of initial conditions belonging the phase space of the system.…”

Section: Global Stability Of the Microswitchmentioning

confidence: 99%

MEMS SPDT microswitch with low actuation voltage for RF applications

Samaali

Najar

Ouni

et al. 2015

Microelectronics International

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If you would like to write for this, or any other Emerald publication, then please use our Emerald for Authors service information about how to choose which publication to write for and submission guidelines are available for all. Please visit www.emeraldinsight.com/authors for more information. About Emerald www.emeraldinsight.comEmerald is a global publisher linking research and practice to the benefit of society. The company manages a portfolio of more than 290 journals and over 2,350 books and book series volumes, as well as providing an extensive range of online products and additional customer resources and services.Emerald is both COUNTER 4 and TRANSFER compliant. The organization is a partner of the Committee on Publication Ethics (COPE) and also works with Portico and the LOCKSS initiative for digital archive preservation. AbstractIn the present work, we propose a novel design of an ohmic contact SPDT (Single-Pole Double-Throw) MEMS microswitch for RF applications. We study the dynamic behavior of the SPDT MEMS microswitch. The proposed microswitch (SPDT design) shares antenna between transmitter and receiver in a wireless sensor. An electrical voltage is used to create an electrostatic force that controls the On/Off states of the microswitch. First, we develop a mathematical model of the proposed microswitch and propose a Reduced-Order Model (ROM) of the design, based on the Differential Quadrature Method (DQM), which fully incorporates the electrostatic force nonlinearities. We solve the static, transient and dynamic behavior and compare the results with Finite Element solutions. Then we examine the dynamic solution of the switch under different actuation waveforms. The obtained results showed a significant reduction in actuation voltage, pull-in bandwidth and switching time.

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“…Microbeams and microplates are widely used in different fields such as in biotechnology [1], radiology [2], resonators [3], microbiology [4], radioactivity detection [5], and in many microelectromechanical systems (MEMS) such as micro-pressure sensors [6,7], micro-pumps [8,9] and micro-switches [10]. Therefore, different characteristics of these microstructures, especially their mechanical behavior, have been the focus of significant research.…”

Section: Introductionmentioning

confidence: 99%