A Dual-Chamber Serial–Parallel Piezoelectric Pump with an Integrated Sensor for Flow Rate Measurement

Chen, Song; Yu, Mai; Kan, Junwu; Li, Jianping; Zhang, Zhonghua; Xie, Xinyi; Wang, Xiaomin

doi:10.3390/s19061447

Cited by 13 publications

(8 citation statements)

References 16 publications

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“…The design of the multipump chamber adopted from micropump designs [ 99 , 161 , 162 ] can be investigated in the piezoelectric stack pump to increase its performance. The double-piezoelectric pump was reported to have a significant increase in both the flow rate and the output pressure and produce a continuous fluid flow inside the system [ 163 ].…”

Section: Hybrid Piezoelectric–hydraulic Systemmentioning

confidence: 99%

“…In other applications, a bimorph configuration can be constructed from two piezoelectric elements to create a two-way bending motion (Figure 8b). The bending motion from unimorph and bimorph configurations can be used in the inertial piezoelectric actuator [98] or as an active valve of the piezoelectric micropump [99]. A combination of a piezoelectric bender and a compliant mechanism was also proposed to control a helicopter rotor blade [100].…”

Section: Piezoelectric Bendingmentioning

confidence: 99%

See 1 more Smart Citation

Large-Scale Piezoelectric-Based Systems for More Electric Aircraft Applications

Lubecki

Chow

et al. 2021

Micromachines

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A new approach in the development of aircraft and aerospace industry is geared toward increasing use of electric systems. An electromechanical (EM) piezoelectric-based system is one of the potential technologies that can produce a compactable system with a fast response and a high power density. However, piezoelectric materials generate a small strain, of around 0.1–0.2% of the original actuator length, limiting their potential in large-scale applications. This paper reviews the potential amplification mechanisms for piezoelectric-based systems targeting aerospace applications. The concepts, structural designs, and operation conditions of each method are summarized and compared. This review aims to provide a good understanding of piezoelectric-based systems toward selecting suitable designs for potential aerospace applications and an outlook for novel designs in the near future.

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Section: Hybrid Piezoelectric–hydraulic Systemmentioning

confidence: 99%

Section: Piezoelectric Bendingmentioning

confidence: 99%

Large-Scale Piezoelectric-Based Systems for More Electric Aircraft Applications

Lubecki

Chow

et al. 2021

Micromachines

View full text Add to dashboard Cite

show abstract

“…Fluid-structure interaction method was used for modeling of the pump. Measurement of flow rate using a pump comprising piezoelectric vibrator with an inbuilt sensor based on driving voltage is addressed in reference [29]. Measurement of flow rate through analysis of the fluid temperature profile is highlighted in reference [30].…”

Section: Referencesmentioning

confidence: 99%

A Soft Sensor for Estimation of In-Flow Rate in a Flow Process Using Pole Placement and Kalman Filter Methods

2019

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This article reports the design of a soft sensor for estimation of in-flow to the control valve in a flow process. The objective of the proposed work is to design and compare the performance of pole placement and Kalman filter-based observers. The observer is designed to estimate the in-flow from the measured out-flow. A mathematical model is derived for the considered physical plant using the system identification technique. An observer is designed using Pole Placement and Kalman Filter methods from the derived plant model. The obtained observer is implemented on a real-life setup for estimation of the in-flow rate. Results obtained from the designed observers are then analyzed to select the better observer. Comparison of performance based on results from Kalman Filter and Pole Placement method of observers shows that the former is more accurate, whereas the computation time is smaller in the latter. Results achieved from the designed soft sensor are verified using an electromagnetic flowmeter, and the results have a root-mean-square percentage error of 0.79%.

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“…A variety of innovative chamber structural designs have been proposed to improve the flow rate of the piezoelectric micropump, mainly including the number of pump chambers [21,22], the shape of the pump chamber [23,24], and the structure of the pump chamber [25]. As the main flow and retention space of the fluid in the micropump, the increase in the diameter and number of the pump chamber can significantly improve the flow rate of the micropump.…”

Section: Introductionmentioning

confidence: 99%

Implantable double-layer pump chamber piezoelectric valveless micropump with adjustable flow rate function

Shen¹,

Guo²,

Ran³

et al. 2022

J. Micromech. Microeng.

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The piezoelectric valveless micropump with the characteristics of precise liquid delivery is widely utilized in the field of biomedicine. However, the improvement of the flow rate of the piezoelectric micropump relies on the increase in size and driving voltage, which hinders its application in the implantable medical field. This article proposes a double-layer chamber valveless piezoelectric micropump, which has the obvious advantages of small size and adjustable flow rate, and is expected to be applied to the treatment of implantable hydrocephalus. The overall size of the micropump is 10 mm × 10 mm × 4 mm, which can be implanted in the cerebral cortex. Combined with polydimethylsiloxane-polyethylene glycol terephthalate bonding technology, the double-layer chamber micropump solves the contradiction between miniaturization and large flow range. The flow rate generated by micropump under low voltage can be adjusted according to the amount of hydrocephalus. In order to reveal the mechanism of increasing the flow rate, the working efficiencies of the microvalve and micropump are studied in this article. The electric-solid-fluid coupling simulation and experimental tests obtained the optimal structural parameters: the divergence angle is 30°, the throat width is 300 μm, and the upper chamber depth is 100 μm. The proposed micropump can achieve the tunable flow rate of 2.16-51.74 μl min-1.

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A Dual-Chamber Serial–Parallel Piezoelectric Pump with an Integrated Sensor for Flow Rate Measurement

Cited by 13 publications

References 16 publications

Large-Scale Piezoelectric-Based Systems for More Electric Aircraft Applications

Large-Scale Piezoelectric-Based Systems for More Electric Aircraft Applications

A Soft Sensor for Estimation of In-Flow Rate in a Flow Process Using Pole Placement and Kalman Filter Methods

Implantable double-layer pump chamber piezoelectric valveless micropump with adjustable flow rate function

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