A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

Pistorio, Francesca; Saleem, Muhammad Mubasher; Somà, Aurelio

doi:10.3390/app11031129

Cited by 20 publications

(19 citation statements)

References 26 publications

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“…The MEMS gyroscope operates on different mechanisms. The most commonly adopted mechanisms are electrostatic [ 22 , 23 ] and piezoelectric [ 24 , 25 ], compared to electromagnet [ 26 ] and electrothermal [ 27 ] mechanisms. In recent developments, some key gyroscope designs such as vibrating-ring, tuning fork, decoupled, and dual mass [ 28 ] were found to be the most popular gyroscope structures [ 29 ].…”

Section: Micro-electromechanical Systems (Mems) Vibrating Gyroscopesmentioning

confidence: 99%

A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments

Gill

Howard

Mazhar

et al. 2022

Sensors

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Micro-electromechanical systems (MEMS) vibrating gyroscopes have gained a lot of attention over the last two decades because of their low power consumption, easy integration, and low fabrication cost. The usage of the gyroscope equipped with an inertial measurement unit has increased tremendously, with applications ranging from household devices to smart electronics to military equipment. However, reliability issues are still a concern when operating this inertial sensor in harsh environments, such as to control the movement and alignment of mini-satellites in space, tracking firefighters at an elevated temperature, and assisting aircraft navigation in gusty turbulent air. This review paper focuses on the key fundamentals of the MEMS vibrating gyroscopes, first discussing popular designs including the tuning fork, gimbal, vibrating ring, and multi-axis gyroscopes. It further investigates how bias stability, angle random walk, scale factor, and other performance parameters are affected in harsh environments and then discusses the reliability issues of the gyroscopes.

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Section: Micro-electromechanical Systems (Mems) Vibrating Gyroscopesmentioning

confidence: 99%

A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments

Gill

Howard

Mazhar

et al. 2022

Sensors

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“…Based on negative stiffness effect, electrostatic frequency tuning can change the equivalent stiffness of gyro by adjusting the electrostatic force generated on the tuning electrodes [28]. This process can also change the resonant frequency of the gyroscope.…”

Section: Principle Of Electrostatic Frequency Tuningmentioning

confidence: 99%

Stability Boundary and Enhanced Solution of Dual-Mode Based Micro Gyroscope Mode Matching Technology

Xing

Wang

et al. 2022

Micromachines

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During in-run mode matching under a dual-mode gyro scheme, the stability of the closed-loop control system has a boundary. This phenomenon will lead to the failure of the in-run frequency split calibration scheme when the initial mode mismatch is too severe to exceed the stability boundary. This paper gives a detailed analysis of this stability boundary through simulations and experiments. Results show that the length of the stable region will be affected by the resonant frequency and the Q value. High resonant frequency and low Q value will widen the stable region, but also reduce the sensitivity and rapidity of the calibration. In order to remove the limitation of the stability boundary while applying the in-run frequency split calibration under dual-mode architecture, this paper proposes an enhanced solution that combines both the dual-mode scheme and technology of mode switching. The application of mode switching achieves a pre-calibration of frequency split before the normal gyro operation. This solution is implemented in engineering on a hybrid gyro interface circuit prototype with single-mode and dual-mode. Validation experiments confirmed the effectiveness of this solution.

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“…The advantages of MEMS devices lie in their low cost, small size, lightweight, low power consumption, high reliability, easy integration, and suitability for harsh working environments [3][4][5][6]. Then, MEMS devices are employed in a wide range of applications and fields, from industrial to consumer areas [7][8][9][10], being also recently attractive in the field of the Internet Of Things technology [11,12].…”

Section: Introductionmentioning

confidence: 99%

Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study

Pistorio

Somà

2023

J. Micromech. Microeng.

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The characterization of fatigue fracture mechanics in gold-MEMS notched specimens is presented in this work. A test microstructure with a central notched specimen is specifically designed and built to perform on-chip fatigue test. The central specimen undergoes cyclic loading due to the application of alternating voltage. The variation in the microstructure deflection is measured using an optical profilometer and is attributed to the crack growth in the gold material, causing the variation in the specimen stiffness. The occurrence of pull-in condition is used as a fracture detector, then the fracture of the specimen can be recognized without performing scanning electron microscope inspections during the fatigue test. Crack propagation in the test specimen is simulated through a coupled-field electromechanical fracture finite element model and the computed crack path is compared to the results obtained from scanning electron microscope analyses. Finally, Paris' law is applied and the number of cycles to failure is computed by exploiting the results of the fracture model and experimental measurements. Both experimental and numerical results demonstrate that the notch acts as a stress and strain raiser, fostering crack nucleation from the notch root, and that the linear elastic fracture mechanics theory is still valid to describe crack propagation in micro-size samples.

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A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

Cited by 20 publications

References 26 publications

A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments

A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments

Stability Boundary and Enhanced Solution of Dual-Mode Based Micro Gyroscope Mode Matching Technology

Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study

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