A dual-mode surface encoder for position measurement

Gao, Wei; Dejima, Shuichi; Kiyono, Satoshi

doi:10.1016/j.sna.2004.06.004

Cited by 42 publications

(20 citation statements)

References 13 publications

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“…In this prototype measurement system, x is about 300 millimeters. When assuming that tilt motion φ is 1 arc-second, [9][10][11][12][13][14][15][16][17][18] Abbe error is about 1.5 µm. Therefore, this offset causes large measurement error.…”

Section: Prototype Measurement Systemmentioning

confidence: 99%

A high speed and compact system for profile measurement of scroll compressors

Arai

Inada

Yang

et al. 2009

Int. J. Precis. Eng. Manuf.

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Profile measurement of a scroll compressor is important for improving compression efficiency. This paper describes the height profile measurement of a scroll compressor in the manufacturing line using a prototype measurement system. A commercial CMM is also employed for comparison. The measurement repeatability of the height profile by the prototype measurement system is approximately ±1 µm, which satisfies the requirements from the manufacturing line. Through compensation of the tilt component, result of the prototype measurement system is in good agreement with that of the commercial CMM.

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Section: Prototype Measurement Systemmentioning

confidence: 99%

A high speed and compact system for profile measurement of scroll compressors

Arai

Inada

Yang

et al. 2009

Int. J. Precis. Eng. Manuf.

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“…To achieve the maximum benefit from the structured surfaces, application technologies of the micro/nano-structured surfaces have been a fascinating research topic in the last few decades. Structured surfaces have been increasingly demanded in various applications, such as optics [1], solar energy technology [2], bioengineering [3], self-cleaning [4], manufacturing [5,6], and so on [7]. To promote widespread use of structured surfaces, their applications and their mass production, manufacturing technology of structured surfaces for a variety of materials is absolutely essential.…”

Section: Introductionmentioning

confidence: 99%

Investigation of Micro Square Structure Fabrication by Applying Textured Cutting Tool in WEDM

Jian-guo

Zhang

et al. 2015

Micromachines

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This paper studies micro structure fabrication by means of a textured tool cutting edge, which is manufactured by applying the wire cut electrical discharge machining (WEDM). Machining performance of the square structure fabrication on the tool cutting edge is investigated in the WEDM process, and the machining accuracy is explored in experimental analyses. In this proposed method, undesired overcut comes from the discharge between the processing debris and the side wall of the target structure. Furthermore, by applying the textured cutting tool, the target square structure is directly fabricated on the alumina workpiece with just a simple turning process, which verifies the feasibility of the proposed tool cutting edge textured method by applying the WEDM. This technology is expected to become a potential method for the mass production of micro structure surfaces in the future.

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“…Lee [5] developed a special conjugate optical design to achieve nano-scale resolution. Gao [6] proposed a surface encoder which is composed of a slope-sensor and a grid and has the ability to measure multi-DOF. Kao [7] proposed a double diffraction optical design using conjugate optics to achieve nano-resolution.…”

Section: Introductionmentioning

confidence: 99%

A Planar Laser Diffraction Encoder in Littrow Configuration for 2D Nanometric Positioning

Fan

Lee

Chung

2011

AUSMT

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This paper presents a novel design of a planar encoder based on the principle of diffractive interferometry. The system is capable of measuring the two-dimensional displacement of the planar grating of any size. It adopts a specially designed optical path that can increase the alignment tolerance between the optical head and the grating. Given the merits of its simple optical configuration and compact size, it can effectively reduce the environmental disturbance and allow higher stability. The signal processing circuit and waveform subdivision software were also developed to effectively compensate for the waveform errors and count the position to 1nm resolution. Experimental results showed that even in the normal laboratory environment the standard deviation of measured values can be controlled to within 15 nm for a long stroke up to 25 mm on both axes.

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A dual-mode surface encoder for position measurement

Cited by 42 publications

References 13 publications

A high speed and compact system for profile measurement of scroll compressors

A high speed and compact system for profile measurement of scroll compressors

Investigation of Micro Square Structure Fabrication by Applying Textured Cutting Tool in WEDM

A Planar Laser Diffraction Encoder in Littrow Configuration for 2D Nanometric Positioning

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