To achieve areal density of 1 Tb/in" in the next generation hard disk drive (HDD), the slider has to fly at a height of 3-4 nanometers above the disk surface. To obtain the required accuracy of track seeking and following, the same slider may have to possess capability of in-situ flying height (FH) measurement. A new slider has been proposed and designed with in-situ measurement capability of flying height and mechanical impedance of air bearing. With proper aerodynamic design, the slider will fly at the prescribed height. Onto this slider, a much more flexible cantilever will be built to carry the read/write head at its tip. The flexible cantilever, which is driven by PZT film coated on its surfaces, is capable of measuring the flying height in real time. The output of the PZT, namely the electrical impedance, is used as a signal to sense the flying height. Mechanically, this system has three coupling fields, which are related to electrical (PZT), structure (cantilever) and fluid (air bearing). In this PhD study, the air bearing is modeled as by Fukui model due to its accuracy for describing the air bearing in large Knudsen number. Finite element (FE) method was applied to study the cantilever, PZT film and air bearing by building a FE model for them. With the well established FE procedure, the in-situ flying height measurement capability of the new slider has been validated by virtual testing or numerical simulation. The numerical results show that there is a good linearity between the flying height and the output i ATTENTION: The Singapore Copyright Act applies to the use of this document. Nanyang Technological University Library The author wishes to extend his greatest gratitude and appreciation to the following persons, who offered invaluable contribution towards my PhD study: Professor Ling Shih-Fu, the project supervisor, for his distinguished guidance, respectable patience, and novel idea on the project, further more, for his excellent effort on scientific research and distinguished discovery on the novel method on dynamic systems. From him, I learnt much more about the research and life. Dr. Liu Bo, the project co-supervisor, for his respectable guidance, effective discussion and creative advice. Moreover, he gives me lots of advices on research, work and life. The love and the support of my family are instrumental in my ability to complete this report. To them this report is gratefully dedicated. Dr. Zhang Mingsheng, who gives me lots of advices on the MEMS fabrication and slider design. Thanks are also given to associate professor Qiu Jinhao, for his respectable guidance and help on the project. m