A dynamically driven micro mirror array as the encoding mask in a Hadamard transform spectrometer (HTS)

Freeform lens collimating spectrum-folded Hadamard transform near-infrared spectrometer

“…Then the two dispersed beams are focused onto the DMD by imaging lens, folding the entire working spectrum into two parallel and aligned spectral stripes on DMD with only one grating. The DMD composed of a micro-mirror array of 1024 Â 768, and each mirror rotates either þ 12°or À 12°axis to the diagonal line according to the code of Hadamard matrix [11]. It is used as the mask of Hadamard transform to implement the spectrum encoding.…”

Determination of Parameters With Uncertainties for Quality Control in MEMS Fabrication

“…We discuss the procedure on the example of a MEMSmirror resonator array [31], although the procedure has also been demonstrated on pressure membranes [27]. The array is designed at Chemnitz University of Technology in the early 2000s, and a detailed description of the fabrication process can be found in reference [31].…”

“…The array is designed at Chemnitz University of Technology in the early 2000s, and a detailed description of the fabrication process can be found in reference [31]. The most interesting parameters of the resonators are the dimensions of the flexure cross section: thickness th, width w and the built-in mechanical stress σ (see Fig.…”

“…Thus, the knowledge of the variation over a wafer and between wafers of these parameters gives us important information concerning the fabrication of these devices. Undesirable mechanical stress σ in flexures results from the bonding process that is required for the resonator fabrication [31]. In order to bring mechanical stress σ in the model, the nodes at one end of the flexures have been fixed in all directions for the FE calculations, whereas the nodes at the opposite end have been stretched in the x-direction.…”