A fast evaluation method for pitch deviation and out-of-flatness of a planar scale grating

Gao, Wei; Kimura, Akihide

doi:10.1016/j.cirp.2010.03.035

Cited by 37 publications

(32 citation statements)

References 7 publications

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“…In the propose method, wavefront of the zeroth-order diffracted beam and wavefronts of positive and negative first-order diffracted beams from a scale grating obtained in Littrow configurations were utilized to perform a non-contact evaluation of a planar scale grating over the entire area. The feasibility of proposed method has been verified in experiments [7]. In addition, the proposed method has been improved so that the self-calibration of the Fizeau interferometer and the planar scale grating can be conducted simultaneously while considering the out-of-flatness of the reference optical flat and the change of the coordinate system in the Littrow configuration [12].…”

Section: Introductionmentioning

confidence: 95%

“…Moreover, the Z-directional out-of-flatness of the scale grating could also be a source of measurement uncertainty in the planar encoder system. The Xand Y-directional pitch deviations, as well as the out-of-flatness of the scale grating, are thus required to be evaluated and calibrated over the entire surface of a scale grating for high precision measurement applications [7].…”

Section: Introductionmentioning

confidence: 99%

“…In responding to the background described above, the authors' group has proposed a method to simultaneously evaluate both the Xand Y-directional pitch deviations and the Z-directional out-of-flatness of a planar scale grating by utilizing a Fizeau interferometer in the previous work [7]. In the propose method, wavefront of the zeroth-order diffracted beam and wavefronts of positive and negative first-order diffracted beams from a scale grating obtained in Littrow configurations were utilized to perform a non-contact evaluation of a planar scale grating over the entire area.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Uncertainty Evaluation for Measurements of Pitch Deviation and Out-of-Flatness of Planar Scale Gratings by a Fizeau Interferometer in Littrow Configuration

et al. 2018

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Form errors of a planar scale grating, such as pitch deviations and out-of-flatness, are major contributors to the final measurement uncertainty of an interferential scanning-type planar encoder. Following the previous work, in which a method has been proposed to evaluate both the out-of-flatness and the pitch deviations of a planar scale grating by a Fizeau interferometer in Littrow configuration, uncertainty analysis on this method is performed in this paper. Theoretical equations are derived to make quantitative uncertainty analysis while taking possible error factors into account. To overcome the drawbacks of a traditional uncertainty matrix approach, a new procedure is proposed to evaluate the uncertainty in the PV (peak-to-valley) deviation of a surface form, so as to assure the quality of measurement. Experiments are finally conducted to demonstrate the feasibility of proposed uncertainty evaluation method.

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Section: Introductionmentioning

confidence: 95%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Uncertainty Evaluation for Measurements of Pitch Deviation and Out-of-Flatness of Planar Scale Gratings by a Fizeau Interferometer in Littrow Configuration

et al. 2018

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“…The measurement uncertainty of a surface encoder is mainly contributed by the scale grating error and the sensor misalignment error. A method has been proposed to make fast evaluation of the 2D grating error [70]. The surface encoder can be integrated into a surface motordriven planar motion stage to realize a compact precision positioning system (see Fig.…”

Section: Multi-axis Cartesian Systemsmentioning

confidence: 99%

Measurement technologies for precision positioning

et al. 2015

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“…Fig. 39 illustrates the fast evaluation of X and Y pitch deviations and the Z out-of-flatness of a diffraction grating over the field of view of the Fizeau interferometer greater than 100 mm in diameter [66]. The out-of-flatness of the grating is first evaluated from the wavefront of the zero-order diffracted beam from the grating.…”

Section: Optical Systemsmentioning

confidence: 99%