A Fast Optimization Algorithm of FEM/BEM Simulation for Periodic Surface Acoustic Wave Structures

Li, Honglang; Zhang, Lu; Ke, Yabing; Tian, Yahui; Luo, Wei

doi:10.3390/info10030090

Cited by 6 publications

(5 citation statements)

References 25 publications

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“…Without a loss of generality, the surface acoustic wave is assumed to propagate in the

direction on a multi-layered structure. In order to simplify the solution while maintaining a good enough accuracy, the full-scaled 3D finite element model (FEM) was decomposed into a double-finger structure with one period interdigital transducer (IDT) [ 21 , 22 , 23 , 24 , 25 ]. In addition, a substrate with a perfect matching layer set to the bottom for absorbing the wave propagated into the substrate was constructed.…”

Section: Resultsmentioning

confidence: 99%

Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression

Pan,

Yang,

et al. 2023

Micromachines

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SAW devices with a multi-layered piezoelectric substrate have excellent performance due to advantages such as a high quality factor, Q, low loss insertion, large bandwidth, etc. Prior to manufacturing, a comprehensive analysis and proper design are essential to evaluating the device’s key performance indicators, including the Bode Q value, bandwidth, and transverse mode suppression. This study explored the performance of SAW resonators employing a 42°Y-X LiTaO3 (LT) thin-plate-based multi-layered piezoelectric substrate. The thicknesses for each layer of the 42°Y-X LT/SiO2/poly-Si/Si substrate were optimized according to the index of phase velocity, Bode Q value, and bandwidth. The effect of the device structure parameters on the dispersion curve and slowness curve was studied, and a flat slowness curve was found to be favorable for transverse mode suppression. In addition, the design of the dummy configuration was also optimized for the suppression of spurious waves. Based on the optimized design, a one-port resonator on the 42°Y-X LT/SiO2/poly-Si/Si substrate was fabricated. The simulation results and measurements are presented and compared, which provides guidelines for the design of new types of SAW devices configured with complex structures.

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“…Without a loss of generality, the surface acoustic wave is assumed to propagate in the

Section: Resultsmentioning

confidence: 99%

Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression

Pan,

Yang,

et al. 2023

Micromachines

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show abstract

“…For theoretical acoustic studies, we used a combination of finite element and boundary element methods (FEM/BEM), widely used to model complex multilayer systems, such as SAW device [19], [20], [21], [22]. To simulate our piezoelectric resonators, we have built a model that takes into account each material constituting the SAW devices.…”

Section: Simulationmentioning

confidence: 99%

Investigation of Elastic Properties of WO3 Thin Films Supported on Quartz in SAW Sensing Devices

Arab¹,

Madigou²,

Chevallier³

et al. 2022

Preprint

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This study aimed to discuss the combined theoretical and experimental results of elastic properties of the tungsten trioxide films supported on Quartz (YX)/45°/10° resonator, as surface acoustic wave (SAW) device. The SAW system with different thicknesses of WO3 thin films were imaged and structurally characterized by X-Ray diffraction, atomic force and transmission electron microscopy. The deposited WO3 films (100 nm, 200 nm and 300 nm) were crystallized in a single monoclinic phase. The acoustoelectric properties of the SAW system were obtained by combining theoretical simulations with experimental measurements. The modeling of the SAW devices has been performed by the finite element and boundary element methods (FEM/BEM). The theoretical and experimental electrical admittances responses obtained at room temperature gave access to elastic constants. The gravimetric effect of the deposited layers is observed by a resonance frequencies shift to lower values with thicknesses film. Moreover, the acoustic losses are affected by the dielectric losses of the WO3 films, while the resonant frequency decreases almost linearly. SAW devices revealed strong displacement fields with low acoustic losses as a function of WO3 thicknesses. For all the deposited layers, the Young's modulus and the Poisson coefficient obtained are respectively of 8 GPa and 0.5.

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“…For theoretical acoustic studies, a combination of finite element and boundary element methods (FEM/BEM), which is widely used to model complex multilayer systems, such as SAW device [19][20][21][22], has been modified using Mathematica software to match our specific system. To simulate our piezoelectric resonators, we built a model that takes into account each material constituting the SAW devices.…”

Section: Simulationmentioning

confidence: 99%

Investigation of Elastic Properties of WO3 Thin Films Supported on Quartz in Surface Acoustic Wave Sensing Devices

Arab

Madigou

Chevallier

et al. 2022

Electronic Materials

View full text Add to dashboard Cite

This study aims to discuss the combined theoretical and experimental results of elastic properties of tungsten trioxide films supported on Quartz (YX)/45°/10° resonator to form surface acoustic wave (SAW) devices. The SAW systems with different thicknesses of WO3 thin films were imaged and structurally characterized by X-ray diffraction, atomic force, and transmission electron microscopy. The deposited WO3 films (100, 200, and 300 nm of thickness) crystallized in a single monoclinic phase. The acoustoelectric properties of the SAW system were obtained by combining theoretical simulations with experimental measurements. The modeling of the SAW devices has been performed by the finite element and boundary element methods (FEM/BEM). The elastic constants of the films at room temperature were assessed via electrical admittances experiments in light of theoretical calculations. The gravimetric effect of the deposited layers is observed by a shift of the resonance frequency to lower values as the thickness of the films increases. Moreover, the acoustic losses are affected by the dielectric losses of the WO3 films while the resonant frequency decreases almost linearly. SAW devices revealed strong displacement fields with low acoustic losses as a function of WO3 thicknesses. For all the deposited layers, the measured Young’s moduli and Poisson’s ratios are 8 GPa and 0.5, respectively.

show abstract

A Fast Optimization Algorithm of FEM/BEM Simulation for Periodic Surface Acoustic Wave Structures

Cited by 6 publications

References 25 publications

Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression

Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression

Investigation of Elastic Properties of WO3 Thin Films Supported on Quartz in SAW Sensing Devices

Investigation of Elastic Properties of WO3 Thin Films Supported on Quartz in Surface Acoustic Wave Sensing Devices

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