Proceedings Design, Automation and Test in Europe Conference and Exhibition 2000 (Cat. No. PR00537)
DOI: 10.1109/date.2000.840828
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A fault simulation methodology for MEMS

Abstract: Efficient built-in and external test strategies are becoming essential in MicroElectroMechanical Systems (MEMS), especially for high reliability and safety critical applications. To be realistic however, internal and external test must be properly validated in terms of fault coverage. Fault simulation is hence likely to become a critical utility within the design flow. This paper will discuss methods for achieving test support based on the extension of tools and techniques currently being introduced into the m… Show more

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Cited by 6 publications
(3 citation statements)
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“…As described in paper [14] the quiescent current (IDDQ) testing can identify many defects that escape other test methods and is also useful in fault diagnosis, but the future of IDDQ testing is uncertain.…”
Section: Current Based Measurement Techniquesmentioning
confidence: 99%
“…As described in paper [14] the quiescent current (IDDQ) testing can identify many defects that escape other test methods and is also useful in fault diagnosis, but the future of IDDQ testing is uncertain.…”
Section: Current Based Measurement Techniquesmentioning
confidence: 99%
“…Techniques have been developed to reuse existing test techniques to cope with the non-electrical interfaces [3] [4]. Fault models, fault simulation strategies [6] [7] and test solutions for microelectromechanical transducers [8] are currently under development, but additional research in smart sensor test engineering is required. The requirements for test will depend heavily upon the manufacturing procedures and the application.…”
Section: Introductionmentioning
confidence: 99%
“…This kernel can be used in Fault Detection (FD) of MEMS [16][17][18][19][20][21]. FD in MEMS is quite difficult, since faults can originate from various sources such as the electronic and the "mechanical" sections.…”
Section: Introductionmentioning
confidence: 99%