A fibre optic pressure sensor in silicon based on fluorescence decay

Gustafsson, Kari; Hök, Bertil; Jonsson, Lars; Ovrén, C.

doi:10.1016/0250-6874(89)87083-0

Cited by 5 publications

(1 citation statement)

References 3 publications

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“…INTRODUCTION I N COMPARISON with traditional piezoresistive, resonant and capacitive sensors, micro-optical-electromechanical silicon-based sensors (MOEMS) have some promising advantages, for instance, low electromagnetic noise sensitivity and ability to work in explosion and fire hazard environments. Some reports regarding research and development of silicon-based MOEMS pressure, vibration, acceleration sensors and micro-fluidic devices have been presented in [1][2][3][4].…”

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A study of 3D boss structure formation in anisotropic etching of Si (100) in aqueous KOH

Chernov¹,

Chebanov²,

Gridchin

et al. 2015

2015 16th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices

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protection during formation of sensor structures in silicon is presented in [5][6][7][8].The case of simultaneous formation of cavity and V-groove or the boss and V-groove in its middle requires special consideration due to complicated topology and the strong influence of the convex corners underetching. A case of formation of V-groove connected with square aperture in aqueous KOH was experimentally investigated in [6]. In this case, the only two convex corners required compensation. a) b) Fig. 1. Scheme of optomechanical sensor part: а) idealized shape of sensor's optomechanical part: 1 -silicon die; 2 -boss; 3 -V-grooves; 4 -U-groove; 5 -rigid frame, and b) layout mask of optomechanical part with corners compensators.Till recently, the formation of the boss with embedded V-groove for the optic fiber placement has not been investigated experimentally yet. Two main features should be considered for this structure formation by anisotropic etch: a) a rectangular boss with embedded V-groove has eight convex corners. All of these corners should have the Abstract -The results of experimental investigation of formation features of the 3D boss with embedded V-groove for the optic fiber, comprised in optomechanical part of MOEMS photovoltaic pressure sensor are presented. Dependences of ratio change of length of edges <110> and <410> forming underetching compensators of convex corners of the chip have been obtained. To provide good quality of the boss etch, the value of misalignment angle between the mask and silicon wafer primary flat has been defined to be less than 0.5 degrees.Index Terms -silicon photoelectrical pressure sensor, optical fiber, boss structure, V-groove, compensation structures, anisotropic etching in KOH

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confidence: 99%