A Flexible Film Bulk Acoustic Resonator Radio Frequency Sensor Based on Pb1.2(Zr0.52Ti0.48)O3/Polymer Thin Films

Wei, Tianyu; Dong, Bo; Hu, Yuxuan; Lin, Pofeng; Huang, Wobin

doi:10.1109/jsen.2024.3467374

IEEE Sensors J.

2024

DOI: 10.1109/jsen.2024.3467374

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A Flexible Film Bulk Acoustic Resonator Radio Frequency Sensor Based on Pb_1.2(Zr_0.52Ti_0.48)O₃/Polymer Thin Films

Tianyu Wei,

Bo Dong,

Yuxuan Hu

et al.

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A Flexible Film Bulk Acoustic Resonator Radio Frequency Sensor Based on Pb_1.2(Zr_0.52Ti_0.48)O₃/Polymer Thin Films

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References 31 publications

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