A flexible self-calibration method for large-stroke motion stage by using the multi-region stitching strategy based on least square algorithm

Abstract

In this letter, a flexible self-calibration method for large-stroke motion stage (LSMS) was proposed, which adopted the multi-region stitching strategy based on least square algorithm. Through the segmentation of LSMS and the stitching correction of small regions, the compensation of positional accuracy of LSMS was carried out successfully, which breaks through the technical limitation that the current self-calibration method can only calibrate a limited area. This presented method can be expected to realize the calibration of LSMS of arbitrary size instead of high-cost laser interferometer measurement system.

Stitching error compensation for large-area microstructures based on digital oblique scanning exposure mode

“…What's more, to obtain the best compensation optimization effect, self-calibration technology is introduced into the scanning lithography system to ensure the motion accuracy and stability of the system. According to the previous two-dimensional selfcalibration compensation study, 23,29,30) the positional accuracy of the lithographic motion stage can be effectively controlled within 150 nm. In the verification experiment, 2 μm linear grating patterns with horizontal direction and tilted direction were used for exposure, respectively.…”