A flexible, ultra-highly sensitive and stable capacitive pressure sensor with convex microarrays for motion and health monitoring

Xiong, Yan; Shen, Youkang; Tian, Li; Hu, Yougen; Zhu, Pengli; Sun, Rong; Wong, Ching‐Ping

doi:10.1016/j.nanoen.2019.104436

Cited by 430 publications

(318 citation statements)

References 45 publications

Supporting

Mentioning

284

Contrasting

Unclassified

Order By: Relevance

“…[ 80 ] When the electrode is micropatterned, the applied pressure also increases the electrode area, which further increases the capacitance change and sensitivity. [ 45,80 ] Several structures have been used to micropattern the electrode for capacitive pressure sensors, including wrinkled line patterns, microtowers, microdomes, and cylinder shapes. [ 45,76,80,84,85 ] The wrinkled line pattern is similar to the inherent wrinkles in human skin and are often achieved by prestraining PDMS.…”

Section: Capacitive Pressure Sensorsmentioning

confidence: 99%

“…[ 45,80 ] Several structures have been used to micropattern the electrode for capacitive pressure sensors, including wrinkled line patterns, microtowers, microdomes, and cylinder shapes. [ 45,76,80,84,85 ] The wrinkled line pattern is similar to the inherent wrinkles in human skin and are often achieved by prestraining PDMS. [ 76 ] High aspect ratio microtowers and cylindrical columns incorporated into the electrode similarly can enhance the distance available for compression, resulting in higher sensitivities (Figure 3E).…”

Section: Capacitive Pressure Sensorsmentioning

confidence: 99%

“…[ 10 ] New sensors are integral to be able to detect failure early because current technologies often do not detect failure until the graft can no longer be saved. [ 10,26,27 ] As tactile sensors, [ 18,28–36 ] pressure sensors that mimic cutaneous touch perception [ 15,37–40 ] may enable minimal access surgery, [ 41 ] humanoid robots, [ 37 ] human–machine interactions, [ 42–45 ] and biomimetic prostheses. [ 46 ] For instance, when combined with haptic displays, high performance pressure sensors can provide haptic feedback to surgeons to significantly improve the efficacy of minimal access surgical approaches that reduce recovery time, postoperative pain, tissue trauma, and length of hospital stay for patients.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Microengineering Pressure Sensor Active Layers for Improved Performance

Ruth

Feig

Tran

et al. 2020

Adv Funct Materials

379

277

View full text Add to dashboard Cite

Pressure sensors play an integral role in a wide range of applications, such as soft robotics and health monitoring. In order to meet this demand, many groups microengineer the active layer-the layer that deforms under pressure and dictates changes in the output signal-of capacitive, resistive/piezoresistive, piezoelectric, and triboelectric pressure sensors in order to improve sensor performance. Geometric microengineering of the active layer has been shown to improve performance parameters such as sensitivity, dynamic range, limit of detection, and response and relaxation times. There are a wide range of implemented designs, including microdomes, micropyramids, lines or microridges, papillae, microspheres, micropores, and microcylinders, each offering different advantages for a particular application. It is important to compare the techniques by which the microengineered active layers are designed and fabricated as they may provide additional insights on compatibility and sensing range limits. To evaluate each fabrication method, it is critical to take into account the active layer uniformity, ease of fabrication, shape and size versatility and tunability, and scalability of both the device and the fabrication process. By better understanding how microengineering techniques and design compares, pressure sensors can be targetedly designed and implemented.

show abstract

Section: Capacitive Pressure Sensorsmentioning

confidence: 99%

Section: Capacitive Pressure Sensorsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Microengineering Pressure Sensor Active Layers for Improved Performance

Ruth

Feig

Tran

et al. 2020

Adv Funct Materials

379

277

View full text Add to dashboard Cite

show abstract

“…[109,111,126,127] Another example is the detection of the deep internal JVP (Figure 4b) which is valuable for diagnosis of cardiac failure or hypervolemia. [81] Pressure detection is mainly based on piezoresistive, [128] piezocapacitive, [129,130] and piezoelectric [117] effects. Flexible piezoresistive pressure sensors have been studied extensively because of their simple sensor structure and manufacturing process, low power consumption, [105,108] wide range of pressure detection, [106] low detection limit, [131] fast response, [131] and high sensitivity.…”

Section: Pressure Sensorsmentioning

confidence: 99%

Soft Electronics for the Skin: From Health Monitors to Human–Machine Interfaces

Rao

Ershad

Almasri

et al. 2020

Adv Materials Technologies

105

View full text Add to dashboard Cite

Conventional bulky and rigid electronics prevent compliant interfacing with soft human skin for health monitoring and human–machine interaction, due to the incompatible mechanical characteristics. To overcome the limitations, soft skin‐mountable electronics with superior mechanical softness, flexibility, and stretchability provide an effective platform for intimate interaction with humans. In addition, soft electronics offer comfortability when worn on the soft, curvilinear, and dynamic human skin. Herein, recent advances in soft electronics as health monitors and human–machine interfaces (HMIs) are briefly discussed. Strategies to achieve softness in soft electronics including structural designs, material innovations, and approaches to optimize the interface between human skin and soft electronics are briefly reviewed. Characteristics and performances of soft electronic devices for health monitoring, including temperature sensors, pressure sensors for pulse monitoring, pulse oximeters, electrophysiological sensors, and sweat sensors, exemplify their wide range of utility. Furthermore, the soft electronic devices for prosthetic limb, household object, mobile machine, and virtual object control are presented to highlight the current and potential implementations of soft electronics for a broad range of HMI applications. Finally, the current limitations and future opportunities of soft skin‐mountable electronics are also discussed.

show abstract

“…Micro/nano fabricated devices play an essential role in a variety of applications. [1][2][3][4][5][6] Especially, Micro-fabricated pressure sensors have been commonly employed in many fields, including automobile, 7-9 aerospace 10,11 and biomedical [12][13][14] applications for pressure measurements. Micro-fabricated pressure sensors can be divided into capacitive, 15 piezoresitive, 16 optical, 17 and other types.…”

mentioning

confidence: 99%

Micro-Fabricated Presure Sensor Using 50 nm-Thick of Pd-Based Metallic Glass Freestanding Membrane

Toàn

Tuoi

Tsai

et al. 2020

Sci Rep

View full text Add to dashboard Cite

This paper reports on micro-fabricated pressure sensors based on a thin metallic glass membrane. The pd 66 cu 4 Si 30 metallic glass material is deposited successfully by a sputter technique. An amorphous feature of the deposited film is confirmed by high resolution transmission electron microscopy (HR-TEM) and the corresponding the selected area electron diffraction (SAED). The ultra-flat freestanding metallic glass membrane with 50 nm in thickness and 2 mm in circular diameter has been fabricated successfully. In addition, two kinds of micro-fabricated pressure sensor types, including itself membrane and additional metallic glass bar as piezoresistive sensing elements, are proposed and fabricated. A displacement of membrane can reach over 100 µm without any damage to membrane which is equivalent to over 0.7% of an elastic strain. Besides, the temperature coefficient of resistance of the Pdbased metallic glass thin film is extremely low 9.6 × 10 −6 °c −1. This development of nano-thick metallic glass membrane possibly opens a new field of micro-fabricated devices with large displacement and enhanced sensing.

show abstract

A flexible, ultra-highly sensitive and stable capacitive pressure sensor with convex microarrays for motion and health monitoring

Cited by 430 publications

References 45 publications

Microengineering Pressure Sensor Active Layers for Improved Performance

Microengineering Pressure Sensor Active Layers for Improved Performance

Soft Electronics for the Skin: From Health Monitors to Human–Machine Interfaces

Micro-Fabricated Presure Sensor Using 50 nm-Thick of Pd-Based Metallic Glass Freestanding Membrane

Contact Info

Product

Resources

About