A Flying-Spot Scanner

Abstract

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Scanning laser microscopy: From far field to near field

“…Optical resolution associated with this technique is the same with the resolution of the classical optical microscope. First system based on LBIC was developed by Potter [2]. Nowadays the LBIC is a powerful tool of nondestructive investigation in the microelectronics field.…”

Semiconductor measurement technology

“…To demonstrate the need for the peripheral correction, the capacitances of the four diodes in the cell indicated by an asterisk in figure 4 were measured for reverse biases of 0, 0.5, 1, 2,3,5,7,10,14,20,27 and 35 V and the dopant density was calculated for each adjacent pair of capacitance values with and without the peripheral correction applied. The results are shown in figure 5. For this experiment the measuring system was modified such that the meters for reading the capacitance and bias voltage were powered through line voltage regulators to suppress noise and the digital voltmeter for reading the output of the capacitance meter was operated in a filtered mode to achieve resolution to four significant figures.…”

“…The design incorporates optical system concepts from several sources [27][28][29]. The scanner is rugged and does not appear to be susceptible to outside influences such as building vibrations.…”

“…bond monitor, ultrasonic [37][38][39] boron redistribution 14 bulk resistivity [14][15][16][17] capacitance-voltage 10-14; 21-23 charge-coupled device [26][27] conductance-voltage method 22 25 flying-spot scanner [34][35][36] four-probe method (resistivity) [7][8][9] gold-doped silicon [18][19][20] Cray-Brown method 22 18-20; 21-25; 32-33 overlap diode model 45 oxide films [21][22][23][24][25] peripheral correction [10][11][12][13][14] photomask [28][29][30] photoresist [30][31] quadrupole mass analyzer [40][41][42] quasi-static method 23 radioisotope leak test 40 resistivity 7-9; 14-17 scanning electron microscopy 36 silica aquasol polish [7][8][9] sodium contamination 25 spreading resistance …”

Scanning electron microscopy study of the avalanche multiplication factor

“…The experimental technique is essentially the same as the chopped light-beam method [2], [3], except that a submicron-diameter electron beam of a scanning electron microscope was substituted for the focused light beam. For measurement at low beam currents, the beam was modulated at 15 kHz using electrostatic deflection plates, and the sample current was synchronously detected by a lock-in amplifier.…”