A frequency domain method for the measurement of nonlinearity in heterodyne interferometry

Badami, Vivek; Patterson, Steven R.

doi:10.1016/s0141-6359(99)00026-4

Cited by 80 publications

(42 citation statements)

References 15 publications

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“…Namely in case of coordinate multidimensional scanning measurement systems the acquisition speed is crucial. Also processing and evaluation of the interference signal including electronic hardware and software (demodulation and linearization techniques) must be considered during the interferometer design process [40][41][42][43][44][45][46][47]. Each component plays a role in the evaluation of the overall uncertainty of the interferometric systems.…”

Section: Resolution Of the Interferometer And Detectionmentioning

confidence: 99%

Investigation of Short-term Amplitude and Frequency Fluctuations of Lasers for Interferometry

Hrabina¹,

Lazar²,

Holá³

2013

Measurement Science Review

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One of the limiting factors of accuracy and resolution in laser interferometry is represented by noise properties of the laser powering the interferometer. Amplitude and especially frequency fluctuations of the laser source are crucial in precision distance measurement. Sufficiently high long-term frequency stability of the laser source must be achieved especially in applications in fundamental metrology. Furthermore, the short-term frequency variations are also important primarily for measurements done at high acquisition speeds. This contribution presents practical results of measurements of short-term amplitude and frequency noises of a set of laser sources commonly used in laser interferometry. The influence of the interferometer design and electrical parameters of the detection system are also discussed.

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Section: Resolution Of the Interferometer And Detectionmentioning

confidence: 99%

Investigation of Short-term Amplitude and Frequency Fluctuations of Lasers for Interferometry

Hrabina¹,

Lazar²,

Holá³

2013

Measurement Science Review

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“…To reduce the nonlinearity in two-mode heterodyne interferometers, various kinds of heterodyning systems and methods are still being developed (Wuy & Su, 1996;Freitas, 1997;Wu, 2003;Badami & Patterson, 2000;Lin et al, 2000;Hou, 2006;Hou, & Zhaox, 1994). A basic block diagram of the optical and electrical nonlinearity reduction system designed for TLMI is schematically represented in Fig.…”

Section: Nonlinearity Reductionmentioning

confidence: 99%

Nano-Metrology Based on the Laser Interferometers

Olyaee¹,

Hamedi²

2010

Advances in Measurement Systems

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“…The polarization states have been decided by the parameter , , i x χ θ and z in the equation (7) and (8), and the numerical calculation has been based on them. We choose the parameter range in the detecting device of ellipticity The dependence relation of the polarization states and various ellipticity of laser sources for the azimuth angle of misorientation of the birefringent lens is -1°, are plotted in Fig.3.…”

Section: Numerical Calculation Of the Elliptic Polarizationmentioning

confidence: 99%

Error analysis of frequency mixing on heterodyne interferometry detecting device for superfinish surface scratch

Lin

Wang

et al. 2008

SPIE Proceedings

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The precision measurement on surperfinish surface scratch has been currently paid much attention to on electronic products. To meet these demands, a novel method has been proposed which is based on heterodyne interferometry that utilizes birefringent lens as beam splitter and cantilever tip as scanning probe to get the measurement values of sample topography. But the optical nonlinear errors affect the measurement precision of the system. In this paper, we adopt the Jones matrix to analyze the elliptic polarization caused by the three factors existing at the same time, which are polarization ellipticity of laser source, installation orientation error and phase retardation of birefringent lens. The measurement errors of frequency mixing about these elliptic polarization beams arriving at the photodiode detecter are studied by vector theory. The results show that the measurement errors are periodic errors, and they will change from 1.24nm to 3.94 nm when the magnitude of orientation error of birefringent lens changes from 1°to 5°. Also, the methods of reducing measurement errors according to the numerical results in the system are suggested. The measurement precision will be improved by reducing the orientation error or choosing high performance laser source.

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A frequency domain method for the measurement of nonlinearity in heterodyne interferometry

Cited by 80 publications

References 15 publications

Investigation of Short-term Amplitude and Frequency Fluctuations of Lasers for Interferometry

Investigation of Short-term Amplitude and Frequency Fluctuations of Lasers for Interferometry

Nano-Metrology Based on the Laser Interferometers

Error analysis of frequency mixing on heterodyne interferometry detecting device for superfinish surface scratch

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