A full description of a scalable microfabrication process for arrayed electrowetting microprisms

2014

Photocured Materials

This chapter comprehensively presents the various microfabrication schemes and applications that are largely based the photosensitive liquid materials over several decades. Nowadays, those types of photosensitivity-based materials are no doubt playing a significant role for precise fabrication of diverse components and devices at the micro- to nanometer scale. Herein the contents are systematically organized as below. First, the intimate fusion of liquid with light and its demands for development of multidisciplinary technologies are introduced in Section 6.1, subsequently followed by review of fundamental principles with characterization of materials, photoinduced polymerization and miniaturization of objects in Section 6.2. Furthermore, Section 6.3 concisely describes several developed schemes of microfabrication existing at present, such as photolithography, soft lithography, light stereolithography and inkjet printing, for implementation of photosensitive liquid materials. Section 6.4 illustrates a variety of industrial applications closely associated with those above schemes, which include microactuators, microsensors, microfluidic components, optical components, medical devices and other complex three-dimensional microsystems. These are promising to be further explored and developed in the 21st century. Finally, we summarize with conclusions and future outlook in Section 6.5.

Section: Microactuatorsmentioning

confidence: 99%

Microfabrication Processes and Applications of Liquid Photosensitive Materials

2014

Photocured Materials

“…This improved technology was so called EWOD. Since then, it initiated an explosive growth in electrowetting research, especially in the field of optics (Mugele & Baret, 2005;Kuiper, Hendriks, Hayes, Feenstra, & Baken, 2005;Hou, Zhang, Smith, Yang, & Heikenfeld, 2010;Ceyssensa et al, 2013).…”

Section: Introductionmentioning

confidence: 99%

Annealing Effect of High Dielectric Material for Low Voltage Electrowetting on Dielectric (EWOD)

Fu²

2014

MAS

In this paper, the high dielectric constants for Ta 2 O 5 (~18.8) and Nb 2 O 5 (~25.5) were deposited by a RF reactive magnetron sputtering and respectively annealed at 700 °C and 400 °C O 2 ambiance for 30 min in a conventional furnace. The purpose of this study is to optimize the annealing condition (various temperatures at N 2 or O 2 ambiance) of the high-dielectric-constant Ta 2 O 5 and Nb 2 O 5 films deposited by RF reactive magnetron sputtering to enhance the dielectric constant of those films to further lower the operating voltage. Based on the results, an electrowetting optical deflector (EOD) filled with the water (1% sodium dodecyl sulfate (SDS)) and dodecane was fabricated and tested, and the contact angle of the inclined liquid surface on the left and right sidewall can be varied about 70° at 9 V operating voltage. This study provides a practical way to fabricate a high dielectric constant layer for low voltage electrowetting on dielectric (EWOD) application.

“…Research has mostly focused on the area of tunable liquid lenses 5,17) and electronic paper, 6) but only a few on the electrowetting microprism (EMP). 8,9) It is worth to note that the modulating light microprism has potential applications in beam steering, smart headlamps, smart windows, and two-dimensional/three-dimensional (2D/3D) displays, etc. Nevertheless, to date, the operating voltage of these applications has been more than tens of volts.…”

Section: Introductionmentioning

confidence: 99%

Low Voltage Electrowetting Optical Deflector

2011

Jpn. J. Appl. Phys.

This paper demonstrates a low-operating-voltage electrowetting optical deflector (EOD) by reducing the interfacial surface tension between the electrolyte and the surrounding ambience. The goal of this study was to explore various approaches to achieving a low operating voltage. First, two kinds of fluoropolymers (Teflon â AF1601 and Cytop â CTL-809M) were utilized to confirm the thickness effect and wettability. Second, three different dielectric layers (SiO 2 , Si 3 N 4 , and Ta 2 O 5 ) with the same thickness were tested to confirm the dielectric constant effect. Finally, three different surfactants (sodium dodecyl sulfate (SDS), Triton X100, and Triton X15) were used to confirm the interfacial surface tension effect. In this article, we demonstrate that the contact angle of water can change as much as 70 in a dodecane/water/Cytop â /Ta 2 O 5 system (containing 1% SDS) with 11 V; furthermore, switchable apex angles of $AE20 and deflection of a beam passing through the meniscus of EOD are presented.