2022
DOI: 10.1109/led.2022.3196101
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A GHz Operating CMOS Compatible ScAlN Based SAW Resonator Used for Surface Acoustic Waves/Spin Waves Coupling

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Cited by 5 publications
(1 citation statement)
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“…ScAlN is a novel ultra-wide bandgap material, still in research, representing a potential solution for the next generation of wireless standards (above 5G communication systems) which targets higher frequencies [7]. Although ScAlN has not yet a mature technology, the high resonance frequencies and the excellent piezoelectric properties of this material are an advantage for future hybrid spin wave CMOS circuits [12]. The very good piezoelectric properties of ScAlN could also have a major impact in temperature sensors.…”
Section: Introductionmentioning
confidence: 99%
“…ScAlN is a novel ultra-wide bandgap material, still in research, representing a potential solution for the next generation of wireless standards (above 5G communication systems) which targets higher frequencies [7]. Although ScAlN has not yet a mature technology, the high resonance frequencies and the excellent piezoelectric properties of this material are an advantage for future hybrid spin wave CMOS circuits [12]. The very good piezoelectric properties of ScAlN could also have a major impact in temperature sensors.…”
Section: Introductionmentioning
confidence: 99%