2023
DOI: 10.1007/s11432-021-3490-3
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A Hf0.5Zr0.5O2 ferroelectric capacitor-based half-destructive read scheme for computing-in-memory

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“…However, the scaling of FeRAM capacitors is still limited compared to that of transistors, leading to low area efficiency. For instance, the ferroelectric capacitor (FeCAP) area was 40 × 10 3 nm 2 for the 28 nm node in Stefan et al's work [8], and the FeRAM area was 0.49 um 2 for the 130 nm node in Zhao et al's work [9]. Considering the above reasons, multi-level cell (MLC) FeRAM for high-density storage applications has also been continuously explored in recent studies.…”
Section: Introductionmentioning
confidence: 99%
“…However, the scaling of FeRAM capacitors is still limited compared to that of transistors, leading to low area efficiency. For instance, the ferroelectric capacitor (FeCAP) area was 40 × 10 3 nm 2 for the 28 nm node in Stefan et al's work [8], and the FeRAM area was 0.49 um 2 for the 130 nm node in Zhao et al's work [9]. Considering the above reasons, multi-level cell (MLC) FeRAM for high-density storage applications has also been continuously explored in recent studies.…”
Section: Introductionmentioning
confidence: 99%