A High Accuracy and Fast Hybrid On-Chip Temperature Sensor

Abstract

This paper presents a high accuracy and fast hybrid on-chip temperature sensor. The proposed temperature sensor combines a SAR type temperature sensor with a ΣΔ type temperature sensor. The SAR type temperature sensor has fast temperature searching time but it has more error than the ΣΔ type temperature sensor. The ΣΔ type temperature sensor is accurate but it is slower than the SAR type temperature sensor. The proposed temperature sensor uses both the SAR and ΣΔ type temperature sensors, so that the proposed temperature sensor has high accuracy and fast temperature searching. Also, the proposed temperature sensor includes a temperature error compensating circuit by storing the temperature errors in a memory circuit after chip fabrication. The proposed temperature sensor was fabricated in 3.3V CMOS 0.35μm process. Its temperature resolution, power consumption, and area are 0.15℃, 540μW, and 1.2  , respectively.키워드 : 온도센서, 혼합형, SAR, ΣΔ

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