A High Aspect-Ratio Polysilicon Vibrating Ring Gyroscope

Ayazi, Farrokh; Chen, H.H.; Koçer, Fatih; He, Guangke; Najafi, K.

doi:10.31438/trf.hh2000.70

Cited by 20 publications

(4 citation statements)

References 4 publications

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“…In this section, we present the development of a linear mechanical model for a vibrating ring resonator. The ring structure consists of eight semicircular support springs that are connected with the fixed anchor support [20][21][22][23][24]. The vibrational mode shapes characterise the oscillations of the ring.…”

Section: Motion Equations Of Vibrating Ring Gyroscopementioning

confidence: 99%

Dynamic Analysis of a MEMS Vibrating Ring Gyroscope

Gill,

Howard,

Mazhar

et al. 2023

Preprint

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This paper describes developing and analyzing an analytical model of Microelectromechanical Systems (MEMS) internal vibrating ring gyroscope. The internal ring structure consists of eight semicircular beams attached to the externally placed anchors. The paper analyses the vibrating ring gyroscope inplane displacement behavior and the resulting elliptical vibrational modes. The elliptical vibrational modes appear as pairs with the same resonance frequency due to the symmetric nature of the design. The analysis commences by conceptualizing the ring as a geometric structure with a circular shape, possessing specific dimensions such as thickness, height, and radius. We construct a linear model that characterizes the vibrational dynamics of the internal vibrating ring. The analysis encompasses comprehensive mathematical formulations for the radial and tangential displacements in local polar coordinates, considering the inextensional displacement of the ring structure. By utilizing the derived equations, we highlight the underlying relationships driving the vibrational characteristics of the MEMS vibrating ring gyroscope. These dynamic vibrational relationships are essential in enabling the vibrating ring gyroscope's future utilization in accurate navigation and motion sensing technologies.

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Section: Motion Equations Of Vibrating Ring Gyroscopementioning

confidence: 99%

Dynamic Analysis of a MEMS Vibrating Ring Gyroscope

Gill,

Howard,

Mazhar

et al. 2023

Preprint

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“…The same research group [ 51 ] presented a high aspect ratio polysilicon vibrating ring gyroscope fabricated using dry-release microfabrication technology. The vibrating ring gyroscope structure’s height was 80 µm.…”

Section: Micro-electromechanical Systems (Mems) Vibrating Gyroscopesmentioning

confidence: 99%

A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments

Gill

Howard

Mazhar

et al. 2022

Sensors

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Micro-electromechanical systems (MEMS) vibrating gyroscopes have gained a lot of attention over the last two decades because of their low power consumption, easy integration, and low fabrication cost. The usage of the gyroscope equipped with an inertial measurement unit has increased tremendously, with applications ranging from household devices to smart electronics to military equipment. However, reliability issues are still a concern when operating this inertial sensor in harsh environments, such as to control the movement and alignment of mini-satellites in space, tracking firefighters at an elevated temperature, and assisting aircraft navigation in gusty turbulent air. This review paper focuses on the key fundamentals of the MEMS vibrating gyroscopes, first discussing popular designs including the tuning fork, gimbal, vibrating ring, and multi-axis gyroscopes. It further investigates how bias stability, angle random walk, scale factor, and other performance parameters are affected in harsh environments and then discusses the reliability issues of the gyroscopes.

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“…The degree of resonator mode mismatch affects the frequency response. We can use the amplitude [26][27][28][29][30] and phase [31,32] as the basis of modal matching. The third way of voltage tuning combines two physical quantities, amplitude, and phase, as a reference for mode-matching.…”

Section: Introductionmentioning

confidence: 99%

“…As a vibrating structure rotates, the standing wave also rotates due to inertial forces. The angular rotation rate is proportional to the angular rotation rate of the external carrier, and the proportion is fixed [30,[44][45][46]. This phenomenon is called the "Bryan effect".…”

mentioning

confidence: 99%

A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

Zhang

Chen

et al. 2022

Micromachines

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The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor gyroscope in that it structurally discards the high-speed rotor and other moving parts to extend the service life and significantly improve accuracy. The highest accuracy is achieved when the ideal mode-matching state is realized. Due to the processing limitation, this index cannot be achieved, and we can only explore ways to approach this index continuously. This paper’s results of error suppression for the symmetric MEMS gyroscope are initially classified into three categories. The first category mainly introduces the processing structure and working mode of the symmetrical gyroscope. The second is mechanical tuning from the structure and the third is electrostatic tuning from the peripheral control circuit. Based on the listed results, the paper compares the two tuning modes and analyzes their advantages and disadvantages. The fourth category is the tuning means incorporating the emerging algorithm. On this basis, the elements of improvement for future high-precision symmetric MEMS gyroscopes are envisioned to provide a part of the theoretical reference for the future development direction of sensors in inertial navigation.

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A High Aspect-Ratio Polysilicon Vibrating Ring Gyroscope

Cited by 20 publications

References 4 publications

Dynamic Analysis of a MEMS Vibrating Ring Gyroscope

Dynamic Analysis of a MEMS Vibrating Ring Gyroscope

A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments

A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

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