A high efficiency industrial polysilicon solar cell with a honeycomb-like surface fabricated by wet etching using a photoresist mask

Zhang, Hong; Ding, Bin; Chen, Tianhang

doi:10.1016/j.apsusc.2016.07.039

Cited by 11 publications

(5 citation statements)

References 25 publications

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“…Furthermore, the debris produced by laser texturing requires the sample to be polished after texturing, thereby adding complexity to the process. These issues can be avoided by using the photolithographic etching [18,25,26], which affords a facile method for making complex textured surfaces merely by changing the shape of the mask used for defining the etching pattern, and obviates the need for polishing the sample after the textures have been formed. The oval shapes textured surfaces have shown good antifriction and antiwear properties in some cases [27].…”

Section: Accepted Manuscriptmentioning

confidence: 99%

Influence of dimple shape on tribofilm formation and tribological properties of textured surfaces under full and starved lubrication

Zheng

Abuflaha

et al. 2019

Tribology International

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Lubrication conditions have significant influences on the formation of tribofilms and then affect tribological behavior. In this work, the influence of tribofilm formation on the tribological behavior of textured surfaces with oval shapes was measured using a pin-on-plate tribometer. The results show that, under full lubrication, the adsorbed oil film controlled the friction and wear behavior of steel/steel tribopairs but under starved lubrication, the formation of a tribofilm significantly influenced the tribological behavior. The appropriate textured surfaces with oval-shaped dimples contributes to obtaining excellent antifriction and antiwear behavior. However, excessively high ratios of the major to the minor axis of the oval can result in high contact stresses which can destroy the tribofilm.

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Section: Accepted Manuscriptmentioning

confidence: 99%

Influence of dimple shape on tribofilm formation and tribological properties of textured surfaces under full and starved lubrication

Zheng

Abuflaha

et al. 2019

Tribology International

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show abstract

“…Alternatively, with the use of photolithography, some parts of the surface can be masked, resulting in anisotropic etching of the surface. This has proven successful, 19,20 but such an expensive approach would limit the wide scale application.…”

Section: Introductionmentioning

confidence: 99%

Advanced textured monocrystalline silicon substrates with high optical scattering yields and low electrical recombination losses for supporting crack‐free nano‐ to poly‐crystalline film growth

Vrijer

Smets

2021

Energy Science & Engineering

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Crystalline silicon tandem devices with perovskites, CIGS, and nanocrystalline silicon, as well as the TOPCon design, are incompatible with the conventional pyramidal surface texture of silicon. This is a result of crack formation in nano to polycrystalline growth on large sharp surface features. In this work, three texturing approaches are investigated, using alkaline and/or acidic wet chemical etches, that can lead to the crack‐free growth of nano to polycrystalline materials on textured surfaces. In this work, we show that without acidic smoothening, the fraction of <111> pyramidal surface coverage has to remain relatively small to prevent crack formation during crystalline growth on these surfaces. Applying an acidic etch as a function of time continuously smoothens surface features. This shifts the reflection to wider scattering angles and results in higher total reflected intensity with respect to the conventional texture, making it an interesting option for a wide variety of tandem pv applications. Finally, we demonstrate crater‐like features on a <100> monocrystalline silicon surface using an etching process including a sacrificial layer. These craters increase light scattering into wider angles, but to a lesser extent than the former approach. In terms of passivation, we demonstrate the positive effect of a post deposition hydrogen treatment. Initial dilution of the silane plasma improves passivation on a <111> surface, but is detrimental to passivation on a <100> surface, likely because the hydrogen dilution results in epitaxial growth at the c‐Si/a‐Si:H hetero‐interface. A minority carrier lifetime of over 3 ms has been achieved for all texturing approaches, after deposition of a 15 nm a‐Si:H layer on both sides of the wafer, for different a‐Si:H deposition and annealing schemes.

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“…It can achieve the isotropic etching of amorphous and polycrystalline materials, which can produce not only trenches and cavities but also microlens structures on mold materials, as shown in figure 5. Zhang et al produced a honeycomb-like textured surface with a pitch of 18 µm on multi-crystalline Si via a masked wet etching process [17]. Sood et al created deep Ta film trenches with widths ranging from 10 to 200 µm via hot NaOH/H 2 O 2 and KOH/H 2 O 2based solutions [18].…”

Section: Wet Etchingmentioning

confidence: 99%

A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

Zhou

Wang

et al. 2021

Int. J. Extrem. Manuf.

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Micro/nanostructured components play an important role in micro-optics and optical engineering, tribology and surface engineering, and biological and biomedical engineering, among other fields. Precision glass molding technology is the most efficient method of manufacturing micro/nanostructured glass components, the premise of which is meld manufacturing with complementary micro/nanostructures. Numerous mold manufacturing methods have been developed to fabricate extremely small and high-quality micro/nanostructures to satisfy the demands of functional micro/nanostructured glass components for various applications. Moreover, the service performance of the mold should also be carefully considered. This paper reviews a variety of technologies for manufacturing micro/nanostructured molds. The authors begin with an introduction of the extreme requirements of mold materials. The following section provides a detailed survey of the existing micro/nanostructured mold manufacturing techniques and their corresponding mold materials, including nonmechanical and mechanical methods. This paper concludes with a detailed discussion of the authors recent research on nickel-phosphorus (Ni-P) mold manufacturing and its service performance.

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A high efficiency industrial polysilicon solar cell with a honeycomb-like surface fabricated by wet etching using a photoresist mask

Cited by 11 publications

References 25 publications

Influence of dimple shape on tribofilm formation and tribological properties of textured surfaces under full and starved lubrication

Influence of dimple shape on tribofilm formation and tribological properties of textured surfaces under full and starved lubrication

Advanced textured monocrystalline silicon substrates with high optical scattering yields and low electrical recombination losses for supporting crack‐free nano‐ to poly‐crystalline film growth

A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

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