A high-frequency comb-actuated resonant MEMS scanner for microdisplays

Gökçe, Sertan Kutal; Holmström, Sven; Brown, Dean; Davis, Wyatt O.; Ürey, Hakan

doi:10.1109/omems.2011.6031064

Cited by 9 publications

(8 citation statements)

References 12 publications

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“…Similarly to Zhang et al, 12 Gokce et al, 13 and Wolter et al 14 also suggest modifications to MEMS mirrors to improve their efficacy. Both studies suggest that a better mounting strategy of the mirror to its base can decrease the mirror's dynamic deformation, significantly improving the flatness of the mirror during operation.…”

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confidence: 88%

“…Both studies suggest that a better mounting strategy of the mirror to its base can decrease the mirror's dynamic deformation, significantly improving the flatness of the mirror during operation. Gokce et al 13 proposed a structure that mitigates dynamic deformation by increasing the isolation between the mirror and the flexible, dampening features. They also use a backbone structure on the back of the mirror to decrease dynamic deformation.…”

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confidence: 99%

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Characterization of laser thermal loading on microelectromechanical systems-based fast steering mirror in vacuum

2020

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Microelectromechanical systems (MEMS) have produced high-quality, high-bandwidth, small form factor, and inexpensive fast steering mirror (FSM) devices potentially suitable for a large variety of applications, such as image stabilization and beam pointing in satellitebased and ground-based, free-space optical communication systems. However, one outstanding question for this application is power handling. The absorption of the mirror substrate is low, but non-negligible, so the question remains of whether thermal loading from laser radiation on a MEMS mirror will deform its surface and, if so, to what extent. We show experimental results of optical performance changes due to thermal loading for MEMS two-axis FSM devices from Mirrorcle Technologies, Inc. Results and reproducible behavior are reported and compared in ambient versus vacuum conditions, where the benefits of convective cooling are absent. Finite element analyses corroborate the experimental results and show that the mirror substrate can deform due to thermal expansion imbalances. The deformation changes the focusing characteristics of the mirror, with a peak to valley defocus (second-order Zernike mode) of up to 50 nm when the mirrors are tested in ambient and up to approximately 450 nm when under vacuum. Such defocusing negatively impacts the link budget for laser-based satellite communications. © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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confidence: 88%

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confidence: 99%

Characterization of laser thermal loading on microelectromechanical systems-based fast steering mirror in vacuum

2020

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“…8. References and details of the individual scanners can be found in Table III [38]- [40], [44], [45], [52], [73]- [75], [77]- [80], and [85]- [96]. Only scanners with a working frequency above 15 kHz and a θ opt • D • f h higher than 500 deg • mm • kHz are included.…”

Section: Resonant Scanners (Fast Axis)mentioning

confidence: 99%

“…There has been an intense research on ES MEMS scanners for more than one decade [73], [74], [77], [79], [85], [98]. The first well-characterized high-frequency ES scanner for display applications was published in 2000 by Conant et al [43].…”

Section: A Electrostatically Actuated Scannersmentioning

confidence: 99%

MEMS Laser Scanners: A Review

Holmström

Baran

Ürey

2014

J. Microelectromech. Syst.

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405

175

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Laser scanners have been an integral part of MEMS research for more than three decades. During the last decade, miniaturized projection displays and various medicalimaging applications became the main driver for progress in MEMS laser scanners. Portable and truly miniaturized projectors became possible with the availability of red, green, and blue diode lasers during the past few years. Inherent traits of the laser scanning technology, such as the very large color gamut, scalability to higher resolutions within the same footprint, and capability of producing an always-in-focus image render it a very viable competitor in mobile projection. Here, we review the requirements on MEMS laser scanners for the demanding display applications, performance levels of the best scanners in the published literature, and the advantages and disadvantages of electrostatic, electromagnetic, piezoelectric, and mechanically coupled actuation principles. Resonant high-frequency scanners, low-frequency linear scanners, and 2-D scanners are included in this review. [2013-0235]

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“…It so far has been tried to shift the resolution limits only by increasing the driving power in order to increase the torque acting on the MEMS mirror axes. Consequently, driving circuits for electrostatically actuated MEMS mirrors have to handle disadvantageously high driving voltages [6,7] or, in the case of electromagnetically actuated mirrors, driving currents and power consumption are disadvantageously high [4]. Thus, the MEMS mirror concept proposed in this paper is to reduce gas damping instead of further increasing power consumption.…”

Section: Mems Mirror Conceptmentioning

confidence: 99%

High-Q MEMS Resonators for Laser Beam Scanning Displays

2012

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This paper reports on design, fabrication and characterization of high-Q MEMS resonators to be used in optical applications like laser displays and LIDAR range sensors. Stacked vertical comb drives for electrostatic actuation of single-axis scanners and biaxial MEMS mirrors were realized in a dual layer polysilicon SOI process. High Q-factors up to 145,000 have been achieved applying wafer level vacuum packaging technology including deposition of titanium thin film getters. The effective reduction of gas damping allows the MEMS actuator to achieve large amplitudes at high oscillation frequencies while driving voltage and power consumption can be minimized. Exemplarily shown is a micro scanner that achieves a total optical scan angle of 86 degrees at a resonant frequency of 30.8 kHz, which fulfills the requirements for HD720 resolution. Furthermore, results of a new wafer based glass-forming technology for fabrication of three dimensionally shaped glass lids with tilted optical windows are presented.

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A high-frequency comb-actuated resonant MEMS scanner for microdisplays

Abstract: A high-frequency novel torsional MEMS scanner is developed for high resolution microdisplays employing a multiframe geometry. For the torsional mirror, 26.7° and 36.1° totaloptical-scan-angle are achieved at resonance, at atmospheric pressure and vacuum respectively.

Cited by 9 publications

References 12 publications

Characterization of laser thermal loading on microelectromechanical systems-based fast steering mirror in vacuum

Characterization of laser thermal loading on microelectromechanical systems-based fast steering mirror in vacuum

MEMS Laser Scanners: A Review

High-Q MEMS Resonators for Laser Beam Scanning Displays

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